Tsika SiC yakavharwa graphite heaters for semiconductor wafers

Tsanangudzo Pfupi:

Iyo kambani WeiTai Energy Technology Co., Ltd. ndiye anotungamira mutengesi we advanced semiconductor ceramics uye chete mugadziri muChina anogona panguva imwe chete kupa yakakwira-kuchena silicon carbide ceramic (kunyanya iyoRecrystallized SiC) uye CVD SiC coating.Pamusoro pezvo, kambani yedu yakazvipirawo kuminda yeceramic yakadai sealuminium, aluminium nitride, zirconia, uye silicon nitride, nezvimwe.


Product Detail

Product Tags

Zvinonyanya kukosha zve graphite heater:

1. kufanana kwekupisa chimiro.

2. yakanaka conductivity yemagetsi uye mutoro mukuru wemagetsi.

3. corrosion resistance.

4. inoxidizability.

5. kuchena kwemakemikari yakakwirira.

6. high mechanical simba.

Iyo inobatsira isimba rinoshanda, kukosha kwepamusoro uye kuderera kwekugadzirisa.Tinogona kuburitsa anti-oxidation uye hupenyu hurefu hurefu graphite crucible, graphite mold uye zvese zvikamu zve graphite heater.

Girafu hita (4)

Main parameters ye graphite heater

Kutsanangurwa Kwehunyanzvi

Semicera-M3

Hukuru Density (g/cm3)

≥1.85

Madota Zvirimo (PPM)

≤500

Shore Hardness

≥45

Chaicho Kuramba (μ.Ω.m)

≤12

Flexural Strength (Mpa)

≥40

Compressive Strength (Mpa)

≥70

Max.Saizi yezviyo (μm)

≤43

Coefficient of Thermal Expansion Mm/°C

≤4.4*10-6


  • Zvakapfuura:
  • Zvinotevera: