CHIKAMU/1CVD (Chemical Vapor Deposition) nzira:Pa900-2300 ℃, uchishandisa TaCl5 neCnHm setantalum uye carbon sources, H₂ semhepo inoderedza, Ar₂segasi rinotakura, redhiyo deposition firimu.Iyo yakagadzirwa yakagadzirwa yakagadzikana, yakafanana uye yakakwirira kuchena.Nekudaro, pane mamwe matambudziko ...
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