4″6″ 8″ N-mhando SiC Ingot

Tsanangudzo Pfupi:

Semicera's 4 ″, 6 ″, uye 8 ″ N-mhando SiC Ingots ndiyo ibwe repakona repamusoro-simba uye yakakwirira-frequency semiconductor zvishandiso. Inopa hukuru hwemagetsi emagetsi uye thermal conductivity, idzi ingots dzakagadzirwa kuti dzitsigire kugadzirwa kwezvinhu zvakavimbika uye zvinoshanda zvemagetsi. Vimba neSemicera kune isingaenzaniswi mhando uye kuita.


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Semicera's 4 ", 6", uye 8" N-mhando SiC Ingots inomiririra kubudirira mune semiconductor zvinhu, zvakagadzirirwa kusangana nekuwedzera kwezvinodiwa zvemazuva ano zvemagetsi nemagetsi masisitimu. Iyi ingots inopa hwaro hwakasimba uye hwakasimba hweakasiyana semiconductor application, kuve nechokwadi kuti yakakwana. kushanda uye hupenyu hurefu.

Yedu N-mhando yeSiC ingots inogadzirwa uchishandisa epamberi ekugadzira maitiro ayo anosimudzira maitiro avo emagetsi uye kugadzikana kwekupisa. Izvi zvinoita kuti ive yakanaka kune yakakwirira-simba uye yakakwirira-frequency application, senge inverters, transistors, uye mamwe magetsi emagetsi emagetsi uko kushanda uye kuvimbika kwakakosha.

Iyo chaiyo doping yeiyi ingots inovimbisa kuti inopa inowirirana uye inodzokororwa kuita. Kusaenderana uku kwakakosha kune vanogadzira uye vagadziri vari kusunda miganhu yetekinoroji muminda senge aerospace, mota, uye telecommunications. Semicera's SiC ingots inogonesa kugadzirwa kwemidziyo inoshanda nemazvo pasi pemamiriro akanyanya.

Kusarudza Semicera's N-mhando SiC Ingots zvinoreva kubatanidza zvinhu zvinokwanisa kubata tembiricha yakakwira uye mitoro yemagetsi zvakanyanya nyore. Aya ingots anonyanya kukodzera kugadzira zvinhu zvinoda yakanakisa yekupisa manejimendi uye yakakwirira-frequency mashandiro, akadai seRF amplifiers uye ma module emagetsi.

Nekusarudzira Semicera's 4", 6", uye 8" N-mhando SiC Ingots, urikudyara mune chigadzirwa chinosanganisa zvinhu zvemhando yepamusoro nekunyatso uye nekuvimbika kunodiwa nekucheka-kumucheto semiconductor tekinoroji. Semicera inoramba ichitungamira indasitiri ne kupa zvigadziriso zvitsva zvinofambisa kufambira mberi kwekugadzira zvigadzirwa zvemagetsi.

Items

Kugadzirwa

Tsvakurudzo

Dummy

Crystal Parameters

Polytype

4H

Kutadza kwekutarisa pamusoro

<11-20 >4±0.15°

Electrical Parameters

Dopant

n-mhando Nitrogen

Resistivity

0.015-0.025ohm·cm

Mechanical Parameters

Diameter

150.0±0.2mm

Ukobvu

350±25 μm

Primary flat orientation

[1-100]±5°

Primary flat urefu

47.5±1.5mm

Secondary flat

Hapana

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Bow

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Mberi(Si-face) roughness(AFM)

Ra≤0.2nm (5μm*5μm)

Chimiro

Micropipe density

<1 pa/cm2

<10 ea/cm2

<15 ea/cm2

Metal tsvina

≤5E10atomu/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

Mberi Hunhu

Mberi

Si

Surface finish

Si-face CMP

Zvimedu

≤60ea/wafer (saizi≥0.3μm)

NA

Makwara

≤5ea/mm. Kureba kwekuwedzera ≤Diameter

Cumulative kureba≤2*Diameter

NA

Orenji svuura/makomba/mavara/mitsetse/pakatsemuka/kusvibiswa

Hapana

NA

Edge chips/indents/fracture/hex plates

Hapana

Polytype nzvimbo

Hapana

Cumulative area≤20%

Cumulative area≤30%

Front laser marking

Hapana

Back Quality

Back finish

C-chiso CMP

Makwara

≤5ea/mm,Cumulative kureba≤2*Diameter

NA

Kuremara kumashure (kumucheto machipisi / indents)

Hapana

Back roughness

Ra≤0.2nm (5μm*5μm)

Back laser marking

1 mm (kubva kumusoro kumucheto)

Edge

Edge

Chamfer

Packaging

Packaging

Epi-yakagadzirira ine vacuum packaging

Multi-wafer kaseti kurongedza

* Notes: "NA" zvinoreva kuti hapana chikumbiro Zvinhu zvisina kutaurwa zvinogona kureva SEMI-STD.

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SiC wafers

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