Semicera inopa yakasarudzika tantalum carbide (TaC) machira ezvakasiyana zvikamu uye vatakuri.Semicera inotungamira coating process inogonesa tantalum carbide (TaC) machira kuti awane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kushivirira kwemakemikari, kuvandudza mhando yechigadzirwa cheSIC/GAN makristasi uye EPI layer.Graphite yakavharwa neTaC suceptor), uye kuwedzera hupenyu hwezvinhu zvakakosha reactor. Iko kushandiswa kwetantalum carbide TaC coating ndeyekugadzirisa dambudziko rekumucheto uye kuvandudza kunaka kwekristaro kukura, uye Semicera Semicera yakabudirira yakagadzirisa tantalum carbide coating tekinoroji (CVD), ichisvika padanho repasi rose.
Mushure memakore ebudiriro, Semicera yakakunda tekinoroji yeCVD TaCpamwe nekuedza kwakabatana kwebazi reR&D. Kukanganisa kuri nyore kuitika mukukura kweSiC wafers, asi mushure mekushandisaTaC, musiyano unokosha. Pazasi pane kuenzanisa kwemawafer ane uye asina TaC, pamwe nezvikamu zveSimicera zvekukura kwekristaro imwe chete.
ne uye pasina TaC
Mushure mekushandisa TaC (kurudyi)
Pamusoro pezvo, hupenyu hwesevhisi hweSemicera's TaC yekupfekedza zvigadzirwa hurefu uye hunoshingirira kune yakanyanya tembiricha kupfuura iyo yeSiC coating. Mushure menguva refu yedata rekuyerwa kwerabhoritari, TaC yedu inogona kushanda kwenguva yakareba kusvika pa2300 degrees Celsius. Aya anotevera mamwe emienzaniso yedu: