Bulk CVD SiC Mhete

Tsanangudzo Pfupi:

Bulk CVD SiC mhete dzinoshandisa silicon sosi gasi (senge silicon hydride) uye kabhoni sosi gasi (senge methane) seyakagadzirwa, ichiita pakupisa kwepamusoro kuisa maSiC zvinhu zvakakura pane substrate kana mold. Iyi nzira inobvumira SiC kuiswa zvakafanana pamusoro penzvimbo yakakura, ichigadzira yakasimba uye inopindirana mhete chimiro.

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Sei Silicon Carbide Etching Ring?

RTPCVD SiC zvindorianoshandiswa zvakanyanya mumaindasitiri nesainzi minda mukupisa kwakanyanya uye nharaunda dzinoparadza. Inoita basa rakakosha mukugadzira semiconductor, optoelectronics, chaiyo muchina uye indasitiri yemakemikari. Zvakananga zvikumbiro zvinosanganisira:

1. Semiconductor kugadzira:RTP CVD SiC mheteinogona kushandiswa kupisa uye kutonhora kwemidziyo yesemiconductor, ichipa kudzora tembiricha yakagadzikana uye kuve nechokwadi chechokwadi uye kuenderana kwemaitiro.

2. Optoelectronics: Nekuda kweiyo yakanakisa yekupisa conductivity uye yakakwirira tembiricha kuramba, RTPCVD SiC zvindoriinogona kushandiswa sekutsigira uye kupisa kupisa zvinhu zve lasers, fiber optic yekutaurirana michina uye optical components.

3. Michina yakanyatsogadzirwa: RTP CVD SiC zvindori zvinogona kushandiswa kune zvakarurama zviridzwa uye midziyo mukupisa kwepamusoro uye nzvimbo dzinopisa, dzakadai semavira ekupisa, zvivharo zvevacuum uye makemikari reactors.

4. Indasitiri yemakemikari: Pamusana pekudzivirira kwayo uye kugadzikana kwemakemikari, RTP CVD SiC zvindori zvinogona kushandiswa mumidziyo, mapaipi uye zvinogadzirisa mumakemikari maitiro uye maitiro ekugadzirisa.

Epi System

RTP System

CVD System

Kuita kwechigadzirwa:

1. Sangana nemaitiro ari pasi pe28nm

2. Super corrosion resistance

3. Super yakachena kuita

4. Kuoma kukuru

5. High density

6. Kudzivirira kwekushisa kwepamusoro

7. Pfeka kuramba

Product application:

Silicon carbide zvinhu zvine hunhu hwekuomarara kwakanyanya, kupfeka kuramba, corrosion kuramba uye kugadzikana kwekushisa kwakanyanya. Zvigadzirwa zvine hunyanzvi hwakakwana kuita zvinoshandiswa zvakanyanya mukuoma etching uye TF/Diffusion maitiro.