Nhanganyaya yeSilicon Carbide Coating
Yedu Chemical Vapor Deposition (CVD) Silicon Carbide (SiC) coating inogara yakasimba uye isingapfekeri dhizaini, yakanakira nharaunda inoda yakanyanya kukora uye kupisa kwemafuta.Silicon Carbide coatinginoiswa muzvidimbu zvitete pane akasiyana substrates kuburikidza neCVD maitiro, ichipa epamusoro maitiro ekuita.
Key Features
● -Kuchena Kunoshamisa: Kuzvirumbidza kwekupedzisira-kwakachena kuumbwa kwe99.99995%, zveduSiC coatinginoderedza njodzi dzekusvibiswa mune dzakasimba semiconductor mashandiro.
● -Kupikisa Kwepamusoro: Inoratidza kuramba kwakanakisa kune zvese kupfeka uye ngura, zvichiita kuti ive yakakwana kune inonetsa makemikari uye plasma marongero.
● -High Thermal Conductivity: Inovimbisa kuita kwakavimbika pasi pekupisa kwakanyanya nekuda kweiyo yakasarudzika yekupisa zvivakwa.
● -Dimensional Kugadzikana: Inochengetedza kutendeseka kwechimiro pane dzakasiyana siyana tembiricha, nekuda kweiyo yakaderera yekupisa yekuwedzera coefficient.
● -Kuwedzera Kuoma: Nekuoma rating ye40 GPA, yedu SiC coating inomira yakakosha kukanganisa uye abrasion.
● -Smooth Surface Pedzisa: Inopa girazi-sekupedzisa, kuderedza kugadzirwa kwechikamu uye kuwedzera kushanda zvakanaka.
Applications
Semicera SiC coatingsanoshandiswa mumatanho akasiyana ekugadzira semiconductor, kusanganisira:
● -LED Chip Kugadzirwa
● -Polysilicon Kugadzirwa
● -Semiconductor Crystal Kukura
● -Silicon uye SiC Epitaxy
● -Thermal Oxidation uye Diffusion (TO&D)
Isu tinopa SiC-yakavharwa zvikamu zvakagadzirwa kubva kune yakakwirira-simba isostatic graphite, kabhoni fiber-yakasimbiswa kabhoni uye 4N recrystallized silicon carbide, yakagadzirirwa fluidized-mubhedha reactor,STC-TCS converters, CZ unit reflectors, SiC wafer chikepe, SiCwafer paddle, SiC wafer chubhu, uye wafer carriers anoshandiswa muPECVD, silicon epitaxy, MOCVD maitiro..
Benefits
● -Kuwedzera Hupenyu: Inoderedza zvakanyanya nguva yekudzikira kwemidziyo uye mutengo wekugadzirisa, uchiwedzera kugona kwekugadzira kwese.
● -Kunatsiridza Hunhu: Inowana yakakwirira-kuchena nzvimbo inodiwa kune semiconductor kugadzirisa, nekudaro inowedzera chigadzirwa chemhando.
● -Kuwedzera Kubudirira: Inokwidziridza kupisa uye CVD maitiro, zvichikonzera kupfupika kutenderera nguva uye goho repamusoro.
Zvinotaurwa Nezvehunyanzvi
● -Chimiro: FCC β phase polycrystaline, kunyanya (111) yakatarisana
● -Density: 3.21 g/cm³
● -Kuoma: 2500 Vickes kuoma (500g mutoro)
● -Kuputsika Kuoma: 3.0 MPa·m1/2
● -Thermal Expansion Coefficient (100–600 °C): 4.3 x 10-6k-1
● -Elastic Modulus(1300 ℃):435 GPa
● -Kukobvu Kwemafirimu:100 µm
● -Kushata Kwepamusoro:2-10 µm
Purity Data (Yakayerwa neGlow Discharge Mass Spectroscopy)
| Element | ppm | Element | ppm |
| Li | <0.001 | Cu | <0.01 |
| Be | <0.001 | Zn | <0.05 |
| Al | <0.04 | Ga | <0.01 |
| P | <0.01 | Ge | <0.05 |
| S | <0.04 | As | <0.005 |
| K | <0.05 | In | <0.01 |
| Ca | <0.05 | Sn | <0.01 |
| Ti | <0.005 | Sb | <0.01 |
| V | <0.001 | W | <0.05 |
| Cr | <0.05 | Te | <0.01 |
| Mn | <0.005 | Pb | <0.01 |
| Fe | <0.05 | Bi | <0.05 |
| Ni | <0.01 |
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