Porous tantalum carbide yakavharwabarrel is tantalum carbide sechinhu chikuru chekuputira, tantalum carbide ine yakanakisa corrosion resistance, kupfeka kuramba uye kugadzikana kwekushisa. Inogona kunyatso chengetedza hwaro zvinhu kubva kukukurwa kwemakemikari uye nepamusoro tembiricha mhepo. Iyo base material inowanzo ine hunhu hwekupisa tembiricha kuramba uye corrosion resistance. Inogona kupa simba rakanaka remagetsi uye kugadzikana kwemakemikari, uye panguva imwechete inoshanda senheyo inotsigira yetantalum carbide coating.
Semicera inopa yakasarudzika tantalum carbide (TaC) machira ezvakasiyana zvikamu uye vatakuri.Semicera inotungamira coating process inogonesa tantalum carbide (TaC) machira kuti awane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kushivirira kwemakemikari, kuvandudza mhando yechigadzirwa cheSIC/GAN makristasi uye EPI layer.Graphite yakavharwa neTaC suceptor), uye kuwedzera hupenyu hwezvinhu zvakakosha reactor. Iko kushandiswa kwetantalum carbide TaC coating ndeyekugadzirisa dambudziko remupendero uye kuvandudza kunaka kwekristaro kukura, uye Semicera yakabudirira kugadzirisa tantalum carbide coating tekinoroji (CVD), ichisvika padanho repasi rose.
Mushure memakore ebudiriro, Semicera yakakunda tekinoroji yeCVD TaCpamwe nekuedza kwakabatana kwebazi reR&D. Kukanganisa kuri nyore kuitika mukukura kweSiC wafers, asi mushure mekushandisaTaC, musiyano unokosha. Pazasi pane kuenzanisa kwemawafer ane uye asina TaC, pamwe neSimicera 'zvikamu zvekukura kwekristaro imwe chete.
ne uye pasina TaC
Mushure mekushandisa TaC (kurudyi)
Uyezve, Semicera'sTaC-yakavharwa zvigadzirwakuratidza hupenyu hurefu hwesevhisi uye hukuru hwepamusoro-tembiricha kuramba zvichienzaniswa neSiC coatings.Laboratory kuyerwa kwakaratidza kuti yeduTaC coatingsinogona kugara ichiita patembiricha inosvika 2300 degrees Celsius kwenguva yakareba. Pazasi pane mimwe mienzaniso yemienzaniso yedu: