Kuchena kwepamusoro SiC Carrier / Susceptor

Tsanangudzo Pfupi

Silicon carbide inotakura disc inozivikanwawo seSIC tray, silicon carbide etching disc, ICP etching disc. Silicon carbide tireyi ye LED etching (SiC tray) φ600mm chinhu chakakosha chekuwedzera kune yakadzika silicon etching (ICP etching muchina).

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Tsanangudzo

Silicon carbide ceramics ine yakanakisa mechaniki zvivakwa pakupisa kwekamuri, senge kusimba kwepamusoro, kuomarara kwepamusoro, yakakwira elastic modulus, nezvimwewo, inewo yakanakisa kugadzikana kwepamusoro-tembiricha senge yakakwira thermal conductivity, yakaderera thermal yekuwedzera coefficient, uye yakanaka chaiyo kuomarara uye optical. processing performance.
Iwo akanyanya kukodzera kugadzira precision ceramic parts emidziyo yedunhu yakabatanidzwa senge lithography machine, inonyanya kushandiswa kugadzira SiC carrier/susceptor, SiC wafer bhoti, kuyamwa disc, mvura inotonhorera ndiro, kunyatsoyeresa kuyera reflector, grating nezvimwe zveceramic structural parts.

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Zvakanakira

High tembiricha kuramba: zvakajairika kushandiswa pa 1800 ℃
High thermal conductivity: yakaenzana negraphite zvinhu
Kuomarara kwepamusoro: kuomarara kwechipiri kune dhaimondi, boron nitride
Corrosion resistance: asidhi yakasimba uye alkali haina corrosion kwairi, iyo corrosion resistance iri nani pane tungsten carbide uye alumina.
Chiedza chechiedza: low density, pedyo nealuminium
Hapana deformation: yakaderera coefficient yekuwedzera kwekupisa
Thermal shock resistance: inogona kumirisana nekuchinja kwekushisa kwakapinza, kuramba kuvhunduka kwemafuta, uye ine kuita kwakagadzikana
Silicon carbide carrier yakadai se sic etching carrier, ICP etching susceptor, inoshandiswa zvakanyanya mu semiconductor CVD, vacuum sputtering etc. Tinogona kupa vatengi vane customized wafer carriers yesilicon uye silicon carbide zvinhu kuti zvisangane nemashandisirwo akasiyana.

Zvakanakira

Property	Value	Nzira
Density	3.21 g/cc	Sink-float uye dimension
Kupisa chaiko	0.66 J/g °K	Pulsed laser flash
Flexural simba	450 MPa560 MPa	4 point bend, RT4 point bend, 1300°
Kutsemuka kuomarara	2.94 MPa m1/2	Microindentation
Kuoma	2800	Vicker's, 500g mutoro
Elastic ModulusYoung's Modulus	450 GPA430 GPA	4 pt bend, RT4 pt bend, 1300 °C
Saizi yezviyo	2 – 10 µm	SEM

Profile yekambani

WeiTai Energy Technology Co., Ltd. inotungamira mutengesi wemhando yepamusoro semiconductor ceramics uye chete mugadziri muChina anogona panguva imwe chete kupa yakakwirira-kuchena silicon carbide ceramic (kunyanya iyo Recrystallized SiC) uye CVD SiC coating. Pamusoro pezvo, kambani yedu yakazvipirawo kuminda yeceramic yakadai sealuminium, aluminium nitride, zirconia, uye silicon nitride, nezvimwe.

Zvigadzirwa zvedu zvikuru zvinosanganisira: silicon carbide etching disc, silicon carbide boat tow, silicon carbide wafer boat (Photovoltaic & Semiconductor), silicon carbide furnace chubhu, silicon carbide cantilever paddle, silicon carbide chucks, silicon carbide beam, pamwe neCVD SiC coating uye TaC. coating. Zvigadzirwa zvinonyanya kushandiswa mu semiconductor uye photovoltaic maindasitiri, senge midziyo yekukura kwekristaro, epitaxy, etching, kurongedza, kupfekedza uye diffusion furnaces, nezvimwe.
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