Isostatic PECVD Graphite Boat

Tsanangudzo Pfupi:

Isostatic PECVD graphite boat inoshandiswa zvakanyanya mumhando dzakasiyana-siyana dzekugadzira semiconductor, zvakadai sepolysilicon film deposition, oxide film deposition, nitride film deposition, etc. Kuita kwayo kwakanakisisa kunoita kuti ive yakanaka yewafer carrier muchirongwa chePECVD.

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SEMICERA isostatic PECVD graphite boat is high-purity, high-density graphite product yakagadzirirwa kutsigirwa kwewafer muPECVD (plasma yakagadziridzwa kemikari vapor deposition) maitiro. SEMICERA inoshandisa tekinoroji yepamusoro isostatic yekutsikirira tekinoroji kuti ive nechokwadi chekuti chikepe chegraphite chine yakanakisa tembiricha yekudzivirira, corrosion resistance, dimensional kugadzikana uye yakanaka yekupisa conductivity, inova chinhu chinonyanya kukosha mukuita semiconductor kugadzira.

SEMICERA isostatic PECVD graphite boat ine zvinotevera zvakanakira:

▪ Hutsanana hwepamusoro: Chigadzirwa chegraphite chine utsanana hwepamusoro uye chine tsvina shoma kuitira kuti chisasvibiswa chepamusoro pechingwa.

▪ High density: High density, high mechanical simba, inogona kutsungirira tembiricha yepamusoro uye nzvimbo ine vacuum yakakwirira.

▪ Kugadzikana kwakanaka kwedimensional: Shanduko diki yedimensional pakupisa kwepamusoro kuti uve nechokwadi chekugadzikana kwemaitiro.

▪ Yakanakisa thermal conductivity: Zvinobudirira kutamisa kupisa kudzivirira wafer overheating.

▪ Kusaora kwakasimba: Kukwanisa kudzivisa kukukurwa nemagasi akasiyana-siyana anoparadza uye plasma.

Performance parameter	semicera	SGL R6510	Performance parameter
Kuwanda kwehuwandu (g/cm3)	1.91	1.83	1.85
Kubhenda simba (MPa)	63	60	49
Compressive simba (MPa)	135	130	103
Shore Hardness (HS)	70	64	60
Coefficient yekuwedzera kwekupisa (10-6/K)	85	105	130
Coefficient yekuwedzera kwekupisa (10-6/K)	5.85	4.2	5.0
Kuramba (μΩm)	11-13	13	10

Zvakanakira kusarudza isu:
▪ Kusarudzwa kwezvinhu: High-purity graphite zvinhu zvinoshandiswa kuvimbisa kunaka kwechigadzirwa.
▪ Kugadzira tekinoroji: Isostatic pressing inoshandiswa kuve nechokwadi chehuwandu hwechigadzirwa uye kufanana.
▪ Kugadzirisa saizi: Zvikepe zvegraphite zvehukuru hwakasiyana uye maumbirwo zvinogona kugadzirwa zvinoenderana nezvinodiwa nevatengi.
▪ Kurapa kwepamusoro: Nzira dzakasiyana-siyana dzekurapa kwepamusoro dzinopiwa, dzakadai sekuisa silicon carbide, boron nitride, nezvimwewo, kuti isangane nezvinodiwa zvakasiyana-siyana.