Iwo makuru mabasa esilicon carbide boat rutsigiro uye quartz boat rutsigiro zvakafanana. Silicon carbide bhoti rutsigiro ine mashandiro akanaka asi mutengo wepamusoro. Inoumba humwe hukama nerutsigiro rwechikepe chequartz mumidziyo yekugadzira bhatiri ine hutsinye hwekushanda (senge LPCVD michina uye boron diffusion michina). Mumidziyo yekugadzira bhatiri ine akajairwa mamiriro ekushanda, nekuda kwehukama hwemitengo, silicon carbide uye quartz chikepe tsigiro inova inogarisana uye inokwikwidza mapoka.
① Kutsiva hukama muLPCVD uye boron diffusion michina
LPCVD michina inoshandiswa bhatiri cell tunneling oxidation uye doped polysilicon layer yekugadzirira maitiro. Working principle:
Pasi pemhepo yakadzika-kudzvanywa, yakasanganiswa nekudziya kwakakodzera, kemikari kuita uye deposition firimu kuumbwa kunowanikwa kugadzirira yekupedzisira-yakaonda tunneling oxide layer uye polysilicon firimu. Mune tunneling oxidation uye doped polysilicon layer yekugadzirira process, iyo chikepe inotsigira ine yakanyanya tembiricha yekushanda uye firimu resilicon richaiswa pamusoro. Iyo yekupisa yekuwedzera coefficient yequartz yakasiyana chaizvo neyesilicon. Kana ichishandiswa mukuita kwepamusoro, zvinodikanwa kugara uchiita pickle kubvisa silicon yakaiswa pamusoro kudzivirira quartz boat support kubva pakuputsika nekuda kwekuwedzera kwekupisa uye kuputika nekuda kwekusiyana kwekuwedzera kwemafuta ekuwedzera kubva kusilicon. Nekuda kwekugara kunhonga uye kudzika-kupisa kwesimba, iyo quartz bhoti inobata ine hupenyu hupfupi uye inowanzotsiviwa mugero oxidation uye doped polysilicon layer yekugadzirira maitiro, ayo anowedzera zvakanyanya mutengo wekugadzirwa kwesero rebhatiri. Iyo yekuwedzera coefficient yesilicon carbide iri pedyo neiyo yesilicon. Mune tunnel oxidation uye doped polysilicon layer yekugadzirira, iyo yakasanganiswa silicon carbide boat holder haidi pickling, ine yakakwirira-yepamusoro-tembiricha simba uye yakareba sevhisi yehupenyu, uye yakanaka imwe nzira kune yequartz chikepe chinobata.
Midziyo yekuwedzera yeBoron inonyanya kushandiswa kuita doping boron zvinhu paN-mhando silicon wafer substrate yebhatiri cell kugadzirira P-type emitter kugadzira PN junction. Iyo yekushanda musimboti ndeyekuona kemikari kuita uye molecular deposition firimu kuumbwa mune yakakwirira-tembiricha mamiriro. Mushure mekunge firimu raumbwa, rinogona kuparadzirwa nekupisa-kupisa kwepamusoro kuti uone basa rekuita doping resilicon wafer pamusoro. Nekuda kwekushisa kwakanyanya kwekushanda kwebhoroni yekuwedzera midziyo, quartz chikepe inobata ine yakaderera-yepamusoro-tembiricha simba uye hupenyu hupfupi hwesevhisi mumidziyo yekuwedzera boron. Iyo yakasanganiswa silicon carbide bhoti inobata ine yakakwirira-tembiricha simba uye yakanaka imwe nzira kune iyo quartz bhoti inobata mune boron yekuwedzera maitiro.
② Kutsiva hukama mune mamwe maitiro ekushandisa
SiC bhoti inotsigira ine yakasimba yekugadzira kugona uye kuita kwakanakisa. Mitengo yavo inowanzokwira kupfuura iyo yequartz boat inotsigira. Mune zvakajairika mamiriro ekushanda emidziyo yekugadzirisa maseru, mutsauko muhupenyu hwesevhisi pakati peSiC bhoti zvinotsigira uye quartz bhoti zvinotsigira idiki. Vatengi vepasi vanonyanya kuenzanisa uye sarudza pakati pemutengo nekuita zvinoenderana nemaitiro avo uye zvavanoda. SiC bhoti inotsigira uye quartz chikepe zvinotsigira zvave kugarisana uye kukwikwidza. Nekudaro, iyo gross profit margin yeSiC boat inotsigira yakakwira zvakanyanya parizvino. Nekudzikira kwemutengo wekugadzira weSiC boat inotsigira, kana mutengo wekutengesa weSiC boat uchitsigira uchidzikira, zvinounzawo kukwikwidza kukuru kune quartz boat inotsigira.
(2) Reshiyo yekushandisa
Iyo sero tekinoroji nzira inonyanya PERC tekinoroji uye TOPCon tekinoroji. Mugove wemusika wePERC tekinoroji i88%, uye chikamu chemusika cheTOPCon tekinoroji i8.3%. Mugove wemusika wakabatanidzwa wevaviri ndeye 96.30%.
Sezvinoratidzwa mumufananidzo uri pasi apa:
MuPERC tekinoroji, zvitsigiso zvechikepe zvinodikanwa kune yekumberi phosphorus diffusion uye annealing maitiro. MuTOPCon tekinoroji, zvitsigiso zvechikepe zvinodikanwa kune yekumberi boron diffusion, LPCVD, kumashure phosphorus diffusion uye annealing maitiro. Parizvino, silicon carbide boat inotsigira inonyanya kushandiswa muLPCVD maitiro eTOPCon tekinoroji, uye mashandisiro avo muBoron diffusion process akanyanyosimbiswa.
Mufananidzo Kushandiswa kwechikepe kunotsigira mune sero kugadzirisa maitiro:
Ongorora: Mushure mekupfekedzwa kwepamberi nekumashure kwePERC uye TOPCon tekinoroji, kuchine matanho akadai sekudhinda skrini, sintering uye kuyedza uye kuronga, izvo zvisingabatanidzi kushandiswa kwezvitsigiro zvechikepe uye hazvina kunyorwa mumufananidzo uri pamusoro.
(3) Remangwana rekuvandudza maitiro
Mune ramangwana, pasi pesimba rekwakakwana kwekuita kwakanakira kwesilicon carbide bhoti inotsigira, kuenderera kunowedzera kwevatengi uye kudzikiswa kwemutengo uye kuvandudzwa kweiyo photovoltaic indasitiri, chikamu chemusika chesilicon carbide chikepe chinotsigira chinotarisirwa kuwedzera mberi.
① Munzvimbo yekushanda yeLPCVD uye boron diffusion midziyo, kuita kwakazara kwesilicon carbide boat inotsigira kuri nani pane iyo yequartz uye ine hupenyu hurefu hwesevhisi.
② Kuwedzera kwevatengi kwesilicon carbide bhoti vagadziri vanomiririrwa nekambani kwakatsetseka. Vatengi vazhinji muindasitiri yakadai seNorth Huachuang, Songyu Technology uye Qihao New Energy vatanga kushandisa silicon carbide boat inotsigira.
③ Kudzikiswa kwemutengo uye kuvandudzwa kwehunyanzvi kwagara kuri kutsvaga kweiyo photovoltaic indasitiri. Kuchengetedza mari kuburikidza nemasero makuru ebheteri ndeimwe yezviratidziro zvekudzikisa mutengo uye kubudirira kwekuvandudza muindasitiri yephotovoltaic. Nemaitiro emasero akakura ebhatiri, zvakanakira silicon carbide boat inotsigira nekuda kwekuita kwavo kwakanaka kuzere kuita zvinova pachena.
Nguva yekutumira: Nov-04-2024