Iyo yekukura maitiro eimwe crystal silicon inoitwa zvizere mumunda wekupisa. Munda wakanaka wekupisa unobatsira kuvandudza mhando yekristaro uye ine yakakwira crystallization kunyatsoshanda. Dhizaini yenzvimbo yekudziya inonyanya kutarisisa shanduko uye shanduko yematembiricha magradients mune ino dynamic thermal field. Kuyerera kwegesi mukamuri yevira uye kusiyana kwezvinhu zvinoshandiswa mumunda wekupisa zvinotarisa zvakananga hupenyu hwebasa remunda wekupisa. Munda wekupisa wakagadzirwa zvisina musoro haungoite kuti zviome kukura makristasi anosangana nezvinodiwa zvemhando, asi zvakare haigone kukura makristasi akazara pasi pezvimwe zvinodiwa maitiro. Ichi ndicho chikonzero iyo Czochralski monocrystalline silicon indasitiri inoona inopisa munda dhizaini seyakakosha tekinoroji uye inodyara hombe manpower uye zviwanikwa zvezvinhu mukupisa kwemunda kutsvaga nekusimudzira.
Iyo thermal system inoumbwa nezvinhu zvakasiyana-siyana zvemunda wekupisa. Tichangotaura muchidimbu zvinhu zvinoshandiswa mumunda wekupisa. Kana iri yekugovera tembiricha mumunda wekupisa uye kukanganisa kwayo pakudhonza kwekristaro, isu hatizozviongorora pano. Iyo inopisa munda zvinhu inoreva iyo crystal yekukura vacuum choto. Zvimiro uye thermally insulated zvikamu zvekamuri, izvo zvakakosha kugadzira yakakodzera tembiricha jira rakatenderedza semiconductor kunyungudika uye makristasi.
Poshi. thermal field structure materials
Iyo yakakosha inotsigira zvinhu zvekukura imwechete crystal silicon neCzochralski nzira ndeyepamusoro-kuchena graphite. Graphite zvinhu zvinoita basa rakakosha muindasitiri yemazuva ano. Mukugadzirira kwekamwe crystal silicon neCzochralski nzira, inogona kushandiswa seyekupisa munda zvimiro zvemukati senge maheater, machubhu ekutungamira, macrucibles, insulation machubhu, uye crucible trays.
Graphite zvinhu zvakasarudzwa nekuda kwekureruka kwayo kwekugadzirira mumavhoriyamu makuru, processability uye yakakwirira tembiricha yekudzivirira zvivakwa. Carbon iri muchimiro chedhaimondi kana kuti graphite ine pakakwirira kunyungudika kupfuura chero chinhu kana musanganiswa. Graphite zvinhu zvakanyanya kusimba, kunyanya pakupisa kwakanyanya, uye magetsi uye kupisa kwayo conductivity zvakare yakanaka. Kufambisa kwayo kwemagetsi kunoita kuti ive yakakodzera sechinhu chinopisa, uye ine inogutsa yekupisa conductivity iyo inogona kugovera zvakaenzana kupisa kunogadzirwa nemudziyo kune crucible uye zvimwe zvikamu zvemunda wekupisa. Zvisinei, pakupisa kwakanyanya, kunyanya pamusoro pemarefu marefu, nzira huru yekupisa kupisa ndeye radiation.
Zvikamu zvegraphite zvinotanga kuumbwa neextrusion kana isostatic kudzvanya kweakanaka carbonaceous particles akasanganiswa nebinder. Nzvimbo dzepamusoro-soro dzegraphite dzinowanzo kudzvanywa isostatically. Chidimbu chose chinotanga kugadzirwa nekabhoni chozoiswa graphiti patembiricha yakanyanya, padyo ne3000°C. Zvikamu zvinogadzirwa kubva kune idzi monoliths zvinowanzocheneswa mumhepo ine chlorine pane tembiricha yakakwira kubvisa kusvibiswa kwesimbi kuti ienderane nezvinodiwa semiconductor indasitiri. Nekudaro, kunyangwe nekucheneswa kwakaringana, simbi yekusvibiswa mazinga maodha ehukuru hwepamusoro pane inobvumidzwa nesilicon single crystal zvinhu. Naizvozvo, kutarisirwa kunofanirwa kutorwa mukupisa kwemunda dhizaini kudzivirira kusvibiswa kwezvikamu izvi kubva pakupinda mukunyungudika kana kristaro pamusoro.
Graphite zvinhu zvinopinda zvishoma, izvo zvinobvumira yakasara simbi mukati kuti isvike nyore pamusoro. Uye zvakare, iyo silicon monoxide iripo muchenese gasi yakatenderedza graphite pamusoro inogona kupinda mukati memukati mezvinhu zvakawanda uye kuita.
Ekutanga single crystal silicon choto heaters akagadzirwa nesimbi inofuratira senge tungsten uye molybdenum. Sezvo tekinoroji yekugadzira magirafu inokura, midziyo yemagetsi yekubatanidza pakati pezvikamu zvegraphite inogadzikana, uye imwe chete crystal silicon furnace heaters yakatsiva zvachose tungsten uye molybdenum nezvimwe zvinopisa. Iyo inonyanya kushandiswa graphite zvinhu parizvino isostatic graphite. semicera inogona kupa yakakwira mhando isostatically yakadzvanywa graphite zvinhu.
MuCzochralski single crystal silicon furnaces, C/C composite materials dzimwe nguva inoshandiswa, uye iko zvino yave kushandiswa kugadzira mabhaudhi, nzungu, macrucibles, mahwendefa anotakura zvinhu nezvimwe zvinhu. Carbon/carbon (c/c) composite materials is carbon fiber reinforced carbon-based composite materials. Ivo vane yakakwira chaiyo simba, yakakwira chaiyo modulus, yakaderera kupisa kwekuwedzera coefficient, yakanaka magetsi conductivity, hombe kutsemuka kuomarara, yakaderera chaiyo giravhiti, kupisa kutyisa kuramba, corrosion resistance, Iine nhevedzano yezvivakwa zvakanakisa senge tembiricha kuramba uye parizvino yakapararira. inoshandiswa muaerospace, mujaho, biomaterials nemamwe minda semhando nyowani yemhando yepamusoro inodzivirira tembiricha yezvimiro. Parizvino, iyo huru bhodhoro yakasangana neyemumba C / C inoumbwa zvinhu mutengo uye maindasitiri nyaya.
Kune zvimwe zvinhu zvakawanda zvinoshandiswa kugadzira minda yekupisa. Carbon faibha yakasimbiswa graphite ine zviri nani zvemichina; zvisinei, inodhura uye inoisa zvimwe zvinodiwa zvekugadzira. Silicon carbide (SiC) chinhu chiri nani pane graphite munzira dzakawanda, asi inodhura zvakanyanya uye yakaoma kugadzira zvikamu zvakakura-vhoriyamu. Nekudaro, SiC inowanzoshandiswa seCVD coating kuwedzera hupenyu hwezvikamu zvegraphite zvakafumurwa kune hukasha hwesilicon monoxide gasi uye zvakare kuderedza kusvibiswa kubva kugraphite. Iyo dense CVD silicon carbide coating inodzivirira zvinosvibisa mukati meiyo microporous graphite zvinhu kubva kusvika pamusoro.
Imwe yacho iCVD kabhoni, inogonawo kugadzira dense layer pamusoro pezvikamu zvegraphite. Zvimwe zvinhu zvinodzivirira zvakanyanya, zvakadai se molybdenum kana ceramic zvinhu zvinopindirana nemamiriro ezvinhu, zvinogona kushandiswa apo pasina njodzi yekusvibiswa kwekunyunguduka. Nekudaro, oxide ceramics ine shoma yekukodzera kubata zvakananga ne graphite zvinhu pakupisa kwepamusoro, kazhinji ichisiya mashoma dzimwe nzira kana insulation ichidikanwa. Imwe ndeye hexagonal boron nitride (dzimwe nguva inodaidzwa kuti white graphite nekuda kwemaitiro akafanana), asi ine urombo hwema mechanical properties. Molybdenum kazhinji inonzwisisika kune yakakwira tembiricha yekushandisa nekuda kwemutengo wayo uri pakati nepakati, yakaderera diffusivity mumakristasi esilicon, uye yakaderera segregation coefficient, inenge 5 × 108, iyo inobvumira kumwe kusvibiswa kwemolybdenum isati yaparadza chimiro chekristaro.
piri. Thermal field insulation materials
Iyo inonyanya kushandiswa insulation material kabhoni inonzwa nenzira dzakasiyana siyana. Carbon inonzwa inogadzirwa neshinda dzakatetepa dzinoshanda sekudzivirira kupisa nekuti dzinovharira mwaranzi yekupisa kakawanda pamusoro pechinhambwe chipfupi. Yakapfava kabhoni inonzwa inorukwa kuita masheets matete emidziyo, ayo anobva achekwa kuita chimiro chaunoda uye akagonya zvine simba kune radius inonzwisisika. Yakaporeswa inonzwa inoumbwa nemhando dzefiber zvinhu, uchishandisa kabhoni-ine binder kubatanidza mafiibhi akapararira kuita chimwe chinhu chakasimba uye chine chimiro. Kushandisa kemikari vapor deposition yekabhoni pachinzvimbo chezvisungo zvinogona kuvandudza ma mechanic properties yechinhu.
Kazhinji, nzvimbo yekunze ye insulating yakarapwa inonzwa yakaputirwa neinoenderera mberi graphite coating kana foil kuderedza kukukurwa uye kusakara pamwe nekusvibiswa kwechikamu. Mamwe marudzi e carbon-based insulation materials aripowo, akadai se carbon foam. Kazhinji, graphitized zvinhu zvinonyatsosarudzwa nekuti graphitization inoderedza zvakanyanya nzvimbo yefiber. Izvi zvakakwirira pamusoro penzvimbo zvinhu zvinobvumira kushoma kubuda uye zvinotora nguva shoma kukwevera choto kune vacuum yakakodzera. Imwe mhando ndeye C / C inoumbwa zvinhu, ine zvakatanhamara zvakaita sehuremu huremu, kushivirira kwekukuvara kwakanyanya, uye simba rakakura. Inoshandiswa muminda yekupisa kutsiva graphite zvikamu, izvo zvakanyanya kuderedza kutsiva frequency yezvikamu zvegraphite uye inovandudza imwechete yekristaro mhando uye kugadzikana kwekugadzira.
Zvinoenderana nechikamu chezvakagadzirwa, kabhoni inonzwa inogona kukamurwa kuita polyacrylonitrile-yakavakirwa kabhoni yakanzwa, viscose-yakavakirwa kabhoni yakanzwa, uye asphalt-yakavakirwa kabhoni yakanzwa.
Polyacrylonitrile-yakavakirwa kabhoni inonzwa ine yakakura madota emukati, uye monofilaments inova brittle mushure mekunyanya kupisa. Panguva yekushanda, guruva rinogadzirwa nyore nyore kusvibisa nzvimbo yevira. Panguva imwecheteyo, iyo fibers inopinda nyore nyore pores yevanhu uye maturakiti ekufema, zvichikonzera kukanganisa kuhutano hwevanhu; viscose-yakavakirwa kabhoni yakanzwa Iyo ine yakanaka yekupisa yekuvharisa zvimiro, yakapfava mushure mekupisa kupisa, uye kashoma kuburitsa guruva. Zvisinei, chikamu chemuchinjikwa-chinyorwa cheviscose-based strands chine chimiro chisina kujairika uye kune mipata yakawanda pamusoro pefiber surface, iyo iri nyore kuumba pamberi pemhepo ye oxidizing muCzochralski single crystal silicon furnace. Magasi akadai seCO2 anokonzera kunaya kweokisijeni uye kabhoni zvinhu mune imwechete crystal silicon zvinhu. Vagadziri vakuru vanosanganisira yeGerman SGL nemamwe makambani. Parizvino, pitch-based carbon inonzwa ndiyo inonyanya kushandiswa mu semiconductor single crystal indasitiri, uye kushanda kwayo kwekupisa kwekushisa kuri nani pane iyo yekunamira kabhoni inonzwa. Gum-yakavakirwa kabhoni inonzwa yakaderera, asi asphalt-yakavakirwa kabhoni inonzwa ine kuchena kwepamusoro uye kuderera kweguruva. Vagadziri vanosanganisira Kureha Chemical yekuJapan, Osaka Gasi, nezvimwe.
Sezvo chimiro chekabhoni chakanzwika chisina kugadziriswa, hazvina kunaka kushanda. Iye zvino makambani mazhinji akagadzira nyowani yekupisa yekupisa yakavakirwa pane kabhoni inonzwa - yakarapwa kabhoni inonzwa. Yakarapirwa kabhoni inonzwa inonziwo yakaoma kunzwa. Iyo kabhoni inonzwa ine imwe chimiro uye yekuzvimiririra mushure mekupinzwa neresin, laminated, solidified uye carbonized.
Hunhu hwekukura hweimwe crystal silicon inokanganiswa zvakananga nenzvimbo yekupisa yemunda, uye kabhoni fiber insulation zvinhu zvinoita basa rakakosha munzvimbo ino. Carbon fiber thermal insulation yakapfava ichiri kutora mukana wakakura muindasitiri yephotovoltaic semiconductor nekuda kwemutengo wayo wakanaka, yakanakisa kupisa kwemafuta ekudzivirira, inoshanduka dhizaini uye inogoneka chimiro. Uye zvakare, kabhoni fiber rigid insulation inonzwa ichave nenzvimbo yakakura yekusimudzira mumusika wemafuta wemunda wezvinhu nekuda kweimwe simba uye kushanda kwepamusoro. Isu takazvipira kutsvagisa uye kusimudzira mumunda wemafuta ekudzivirira zvinhu uye nekuenderera mberi nekugadzirisa chigadzirwa kusimudzira budiriro uye kusimudzira kweiyo photovoltaic semiconductor indasitiri.
Nguva yekutumira: May-15-2024