Zvikonzero zvikuru zvinokanganisa kufananidzwa kweradial resistivity yemakristasi imwe chete kupfava kweiyo solid-liquid interface uye diki ndege mhedzisiro panguva yekukura kwekristaro.
Kufuridzirwa kwe flatness ye-soli-liquid interface Panguva yekukura kwekristaro, kana iyo yakanyunguduka ichinyandurwa zvakaenzana, iyo yakaenzana yekudzivirira nzvimbo ndiyo yakasimba-yemvura inoshandiswa (kusvibiswa kwetsvina mukunyunguduka kwakasiyana nekusvibiswa kwetsvina mukristaro, saka iyo resistivity yakasiyana, uye kuramba kwakaenzana chete pane yakasimba-mvura interface). Kana kusachena K<1, iyo interface convex kusvika kunyunguduka ichaita kuti radial resistivity ive yakakwirira pakati uye yakaderera kumucheto, nepo iyo interface concave kunyungudika ndiyo inopesana. Iyo radial resistivity kufanana kweiyo flat solid-liquid interface iri nani. Chimiro cheiyo solid-liquid interface panguva yekukweva kwekristaro inotarwa nezvinhu zvakaita seyekupisa munda kugovera uye kukura kwekristaro inoshanda paramita. Mune yakatwasuka-yakadhonzwa imwe kristaro, chimiro cheiyo yakasimba-yemvura yemvura ndeye mugumisiro wekubatanidzwa kwezvinhu zvakadai sekugovera kwekushisa kwechoto uye kupisa kwekristani.
Pakudhonza makristasi, kune mana makuru emhando yekutsinhana kupisa pane yakasimba-mvura interface:
Latent kupisa kwechikamu shanduko yakaburitswa neyakanyungudutswa silicon solidification
Heat conduction yekunyunguduka
Kupisa kukwidza kumusoro kuburikidza nekristaro
Radiation kupisa kunze kuburikidza nekristaro
Iyo yakadzika kupisa inofanana neyese interface, uye saizi yayo haichinji kana chiyero chekukura chiripo. (Kukurumidza kupisa conduction, kutonhora nekukurumidza, uye kuwedzera kusimba chiyero)
Kana musoro wekristaro iri kukura iri padyo nemvura-yakatonhorera mbeu yekristaro tsvimbo yeimwe kristaro choto, tembiricha gradient mukristaro yakakura, izvo zvinoita kuti longitudinal kupisa conduction kwekristaro hukuru kupfuura kupisa kwemwaranzi yepasi, saka iyo solid-liquid interface convex kusvika pakunyungudika.
Kana iyo crystal inokura kusvika pakati, iyo longitudinal kupisa conduction yakaenzana neyepamusoro radiation kupisa, saka iyo interface yakatwasuka.
Pamuswe wekristaro, iyo longitudinal kupisa conduction ishoma pane yekupisa kwemwaranzi yepasi, zvichiita kuti iyo yakasimba-yemvura interface inyunguduke.
Kuti uwane kristaro imwe chete ine yunifomu radial resistivity, iyo yakasimba-yemvura interface inofanira kuenzaniswa.
Nzira dzinoshandiswa ndeidzi: ①Gadzirisa iyo crystal yekukura yekudziya system kudzikisa radial tembiricha gradient yenzvimbo inopisa.
②Gadzirisa kristaro kudhonza kushanda paramita. Semuenzaniso, kune iyo interface convex kusvika pakunyunguduka, wedzera kumhanya kwekudhonza kuti uwedzere crystal solidification rate. Panguva ino, nekuda kwekuwedzera kwekristallization latent heat yakaburitswa pachiratidziro, tembiricha yekunyunguduka iri padyo neiyo interface inowedzera, zvichikonzera kunyungudika kwechikamu chekristaro pachiratidziro, zvichiita kuti chiratidziro chiwedzere. Pane zvinopesana, kana chimiro chekukura chiri concave chakananga kunyunguduka, chiyero chekukura chinogona kudzikiswa, uye kunyungudika kunosimbisa vhoriyamu inoenderana, ichiita kuti iyo yekukura iite flat.
③ Gadzirisa kumhanya kwekutenderera kwekristaro kana crucible. Kuwedzera kutenderera kwekristaro kunowedzera kuyerera kwemvura yakakwira-yepamusoro ichifamba kubva pasi ichienda kumusoro pane yakasimba-yemvura interface, ichiita kuti interface ichinje kubva kuconvex kuenda kune concave. Nhungamiro yemvura inoyerera inokonzerwa nekutenderera kwe crucible yakangofanana neyechisikigo convection, uye mhedzisiro inopesana zvachose neyekutenderera kwekristaro.
④ Kuwedzera chiyero chemukati dhayamita ye crucible kusvika kudhayamita yekristaro kuchadzikamisa iyo yakasimba-yemvura interface, uye zvakare inogona kuderedza dislocation density uye iyo oksijeni yemukati mukristaro. Kazhinji, iyo crucible dhayamita: crystal dhayamita = 3 ~ 2.5: 1.
Kufurira kweiyo diki yendege athari
Iyo solid-liquid interface yekukura kwekristaro inowanzo komberedzwa nekuda kwekudzikamiswa kweisotherm yakanyungudika mucrucible. Kana kristaro ikasimudzwa nekukasira panguva yekukura kwekristaro, ndege diki yakati sandara ichaonekwa pane solid-liquid interface ye (111) germanium uye silicon single crystals. Ndiyo (111) ndege yakavharwa neatomu, inowanzonzi ndege diki.
Kusachena kwehutsvina munzvimbo diki yendege kwakasiyana kwazvo neiyo munzvimbo isiri-diki ndege. Chiitiko ichi chekuparadzirwa kusiri kujairika kwetsvina munzvimbo diki yendege inonzi diki plane effect.
Nekuda kweiyo ndege diki mhedzisiro, iyo resistivity yenzvimbo diki yendege ichaderera, uye mumatambudziko akaomarara, kusachena pombi cores ichaonekwa. Kuti ubvise iyo radial resistivity inhomogeneity inokonzerwa neiyo ndege diki mhedzisiro, iyo yakasimba-yemvura interface inoda kuiswa.
Gamuchirai chero vatengi vanobva kumativi ese enyika kuti vatishanyire kune imwezve hurukuro!
https://www.semi-cera.com/
https://www.semi-cera.com/tac-coating-monocrystal-growth-parts/
https://www.semi-cera.com/cvd-coating/
Nguva yekutumira: Jul-24-2024