Chekutanga, isa polycrystalline silicon uye dopants mu quartz crucible mune imwechete yekristaro choto, simudza tembiricha kusvika kupfuura 1000 madhigirii, uye tora polycrystalline silicon munzvimbo yakanyungudutswa.
Silicon ingot kukura inzira yekugadzira polycrystalline silicon mune imwechete crystal silicon. Mushure mekunge iyo polycrystalline silicon yapiswa kuita mvura, nharaunda inopisa inodzorwa chaizvo kuti ikure kuita emhando yepamusoro makristasi.
Related concepts:
Kukura kwekristaro imwechete:Mushure mekunge tembiricha yepolycrystalline silicon solution yakagadzikana, kristaro yembeu inodzikiswa zvishoma nezvishoma musilicon melt (iyo kristaro yembeu ichanyungudutswa musilicon melt), uye ipapo kristaro yembeu inosimudzwa pane imwe spidhi yekudyara. process. Zvadaro, kuparadzaniswa kunogadzirwa panguva yekudyara kunobviswa kuburikidza nekushanda kwemutsipa. Kana mutsipa wanyungudutswa kusvika pakureba kwakakwana, dhayamita yesilicon imwe chete yekristaro inowedzerwa kune iyo inotarirwa kukosha nekugadzirisa kukurumidza kudhonza uye tembiricha, uye ipapo dhayamita yakaenzana inochengetwa kuti ikure kusvika pakureba. Chekupedzisira, kuitira kudzivirira kusimuka kubva pakudzokera kumashure, iyo imwechete yekristaro ingot inopedzwa kuti iwane yakapedzwa imwe chete yekristaro ingot, uye yozoburitswa kunze mushure mekunge tembiricha yatonhodzwa.
Nzira dzekugadzira imwe crystal silicon:CZ nzira uye FZ nzira. Nzira yeCZ inodimburirwa senzira yeCZ. Hunhu hweCZ nzira ndeyekuti inopfupikiswa mune yakatwasuka-cylinder thermal system, ichishandisa graphite resistance kudziyisa kunyungudutsa polycrystalline silicon mune yakakwirira-kuchena quartz crucible, uyezve kuisa mhodzi yekristaro munzvimbo yakanyunguduka yewelding, ukuwo. kutenderedza mhodzi yekristaro, uyezve kudzosera crucible. Mbeu yekristaro inosimudzwa zvishoma nezvishoma kumusoro, uye mushure mekuita kwekudyara, kuwedzera, kutenderera kwemafudzi, kukura kwakaenzana kwedhayamita, uye muswe, imwe crystal silicon inowanikwa.
Iyo zone melting method inzira yekushandisa polycrystalline ingots kunyungudusa uye crystallize semiconductor makristasi munzvimbo dzakasiyana. Simba rinopisa rinoshandiswa kugadzira nzvimbo yekunyungudika kune imwe mugumo wetsvimbo yesemiconductor, uyezve imwe kristaro mhodzi yekristaro inosungwa. Iko kutonhora kunogadziriswa kuita kuti nzvimbo yakanyunguduka iende zvishoma nezvishoma kune imwe mugumo wetsvimbo, uye kuburikidza netsvimbo yose, kristaro imwe chete inokura, uye kutaridzika kwekristaro kwakafanana nekristini yembeu. Iyo zone yekunyungudutsa nzira yakakamurwa kuita mhando mbiri: yakachinjika nzvimbo yekunyungudutsa nzira uye yakatwasuka yekumisa nzvimbo yekunyungudutsa nzira. Iyo yekutanga inonyanya kushandiswa kucheneswa uye imwe chete crystal kukura kwezvinhu zvakaita segermanium neGaAs. Iyo yekupedzisira ndeye kushandisa yakakwira-frequency coil mumhepo kana vacuum muvira kugadzira nzvimbo yakanyungudutswa pakusangana pakati peiyo imwe crystal mhodzi yekristaro uye polycrystalline silicon tsvimbo yakamiswa pamusoro payo, uye wozofambisa iyo yakanyungudutswa nzvimbo kumusoro kuti ikure imwe chete. kristaro.
Inenge 85% yesilicon wafers inogadzirwa nenzira yeCzochralski, uye 15% yesilicon wafers inogadzirwa nenzira yekunyungudika kwenzvimbo. Zvinoenderana nekushandiswa, iyo imwechete crystal silicon inokura neiyo Czochralski nzira inonyanya kushandiswa kugadzira yakabatanidzwa yedunhu zvikamu, nepo imwechete crystal silicon inokura neiyo zone yekunyungudutsa nzira inonyanya kushandiswa kune simba semiconductors. Nzira yeCzochralski ine nzira yakakura uye iri nyore kukura yakakura-diameter imwe crystal silicon; iyo zone melting nzira yekunyungudika haibatanidzi mugaba, haisi nyore kusvibiswa, ine kuchena kwepamusoro, uye yakakodzera kugadzirwa kwemagetsi emagetsi emagetsi, asi zvakanyanya kuoma kukura hombe-dhayamita single crystal silicon, uye rinowanzo shandiswa chete 8 inches kana kushoma mudhayamita. Vhidhiyo inoratidza nzira yeCzochralski.
Nekuda kwekuomerwa kwekudzora dhayamita yeimwe crystal silicon rod mukuita kudhonza kristaro imwe chete, kuitira kuwana matanda esilicon emadhayamita akaenzana, akadai se6 inches, 8 inches, 12 inches, etc. Mushure mekudhonza imwe chete. crystal, iyo dhayamita yesilicon ingot ichakungurutswa uye pasi. Iyo yepamusoro yesilicon tsvimbo mushure mekukunguruka yakatsetseka uye saizi yekukanganisa idiki.
Uchishandisa tekinoroji yekucheka tekinoroji, iyo imwe crystal ingot inochekwa kuita silicon wafers yeukobvu hwakakodzera kuburikidza nemidziyo yekuchekesa.
Nekuda kwehudiki hudiki hwesilicon wafer, mupendero wesilicon wafer mushure mekucheka wakapinza kwazvo. Chinangwa chekucheka kumucheto ndechekugadzira mupendero wakatsetseka uye hazvisi nyore kuputsa mune ramangwana chip kugadzira.
KURAMBA ndiko kuwedzera chimedu pakati pendiro inorema yekusarudza uye yepasi yekristaro ndiro, uye kuisa kumanikidza uye kutenderera neabrasive kuita kuti wafer ive flat.
Etching inzira yekubvisa kukuvadzwa kwepamusoro kwewaferi, uye iyo yekumusoro yakakuvadzwa nekugadziriswa kwemuviri inonyungudika nemakemikari mhinduro.
Kukuya mativi maviri inzira yekuita kuti wafer iite flat uye kubvisa maburi madiki pamusoro.
RTP inzira yekukurumidza kupisa mucheki mumasekonzi mashomanana, kuitira kuti kukanganisa kwemukati kwewafesi kuve yunifomu, tsvina yesimbi inodzvinyirirwa, uye kushanda kusina kujairika kwesemiconductor kunodziviswa.
Kupukuta inzira inovimbisa kutsvedzerera kwepamusoro kuburikidza nepamusoro-soro machining. Iko kushandiswa kwekupukuta slurry uye jira rekupukuta, rakasanganiswa neakakodzera tembiricha, kudzvanywa uye kutenderera kumhanya, kunogona kubvisa iyo mechaniki yekukuvadza layer yakasiiwa neyakapfuura maitiro uye kuwana silicon wafers ine yakanakisa pamusoro flatness.
Chinangwa chekuchenesa ndechekubvisa organic matter, particles, metals, nezvimwewo zvakasara pamusoro pechifukidzo chesilicon mushure mekupenya, kuitira kuti tive nechokwadi chekuchena kwesilicon wafer pamusoro uye kusangana nezvinodiwa zvehutano hwemaitiro anotevera.
Iyo flatness & resistivity tester inoona iyo silicon wafer mushure mekukwenenzverwa nekucheneswa kuti ive nechokwadi chekuti ukobvu, flatness, flatness yenzvimbo, curvature, warpage, resistivity, nezvimwe.
PARTICLE COUNTING inzira yekunyatso ongorora iyo pamusoro peiyo wafer, uye hurema hwepamusoro uye huwandu hunotarwa nelaser kuparadzira.
EPI KUKURA inzira yekukura emhando yepamusoro silicon single crystal mafirimu pane akakwenenzverwa silicon wafers nemhute chikamu chemakemikari deposition.
Related concepts:Epitaxial kukura: inoreva kukura kwekristaro imwe chete ine zvimwe zvinodiwa uye yakafanana crystal orientation seyo substrate pane imwechete crystal substrate (substrate), sezvakangoita kristaro yepakutanga inosvika kunze kwechikamu. Epitaxial kukura tekinoroji yakagadziriswa mukupera kwema1950 uye ekutanga 1960s. Panguva iyoyo, kuitira kugadzira yakakwirira-frequency uye yakakwirira-simba zvishandiso, zvaive zvakafanira kudzikisa muunganidzi akateedzana kuramba, uye zvinhu zvaidiwa kuti zvikwanise kukurira yakakwira voltage uye yakakwira ikozvino, saka zvaive zvakafanira kukura yakaonda yakakwira-. resistance epitaxial layer pane yakaderera-resistance substrate. Iyo itsva single crystal layer yakakura epitaxially inogona kuve yakasiyana neiyo substrate maererano nemhando ye conductivity, resistivity, nezvimwewo, uye akawanda-layer single crystals ehukobvu hwakasiyana uye zvinodiwa anogona zvakare kukura, nekudaro achivandudza zvakanyanya kuchinjika kwedhizaini dhizaini uye kushanda kwechigadzirwa.
Packaging ndiko kurongedza kwekupedzisira kwakakodzera zvigadzirwa.
Nguva yekutumira: Nov-05-2024