Iko kumucheto kwepamberi kwemutsara wekugadzira kwakafanana nekuisa nheyo uye kuvaka madziro eimba. Mukugadzira semiconductor, nhanho iyi inosanganisira kugadzira zvimiro zvekutanga uye transistors pane silicon wafer.
Matanho akakosha eFEOL:
1. Kuchenesa:Tanga nemucheka mutete wesilicon uye uchenese kubvisa chero tsvina.
2. Oxidation:Kura chidimbu chesilicon dioxide pawafer kuti uzvitsaure zvikamu zvakasiyana zvechip.
3. Photolithography:Shandisa photolithography kuisa mapatani pawafer, zvakafanana nekudhirowa mablueprint nechiedza.
4. Etching:Etch kure isingadiwe silicon dioxide kuratidza yaidiwa mapatani.
5. Doping:Isai tsvina musilicon kuti ichinje maitiro ayo emagetsi, kugadzira ma transistors, iwo akakosha ekuvaka zvidhinha chero chip.
Mid End of Line (MEOL): Kubatanidza maDots
Iyo yepakati yekupedzisira yemutsetse wekugadzira yakafanana nekuisa wiring uye pombi dzemvura mumba. Iyi nhanho inotarisa pakugadzirisa hukama pakati pema transistors akagadzirwa muFEOL nhanho.
Matanho akakosha eMEOL:
1. Dielectric Deposition:Deposit insulating layers (inonzi dielectrics) kuchengetedza transistors.
2. Kugadzira Kubata:Gadzira vanobatika kuti ubatanidze ma transistors kune mumwe nemumwe uye kunze kwenyika.
3. Kubatana:Wedzera marata esimbi kuti ugadzire nzira dzezviratidzo zvemagetsi, zvakafanana newaya yemba kuti ive nechokwadi chekuisa simba uye kuyerera kwedata.
Kumashure Kupera Kwemutsara (BEOL): Kupedzisa Kubata
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Kumashure kwekupedzisira kwemutsara wekugadzira kwakafanana nekuwedzera iyo yekupedzisira kubata kune imba-kuisa zvigadziriso, kupenda, uye kuona kuti zvese zvinoshanda. Mukugadzira semiconductor, iyi nhanho inosanganisira kuwedzera matinji ekupedzisira uye kugadzirira chip yekurongedza.
Matanho akakosha eBEOL:
1. Mamwe Metal Layers:Wedzera akawanda marata esimbi kuti uwedzere kuwirirana, kuve nechokwadi chekuti chip inogona kubata mabasa akaomarara uye kumhanya kwakanyanya.
2. Passivation:Isa zvidziviriro zvekudzivirira kudzivirira chip kubva mukukuvadzwa kwezvakatipoteredza.
3. Kuedza:Isa iyo chip mukuyedzwa kwakasimba kuti ive nechokwadi chekuti inosangana nezvose zvakatemwa.
4. Dicing:Cheka wafer kuita machipisi ega ega, imwe neimwe yakagadzirira kurongedza uye kushandiswa mumidziyo yemagetsi.
Nguva yekutumira: Jul-08-2024