Iyo semiconductor indasitiri iri kupupurira kusati kwamboitika kukura, kunyanya munzvimbo yesilicon carbide (SiC)magetsi emagetsi.Nezvizhinji zvakakurawafermachira ari kuvakwa kana kuwedzera kuti asangane nekuwedzera kuri kuda kwemidziyo yeSiC mumotokari dzemagetsi, iyi boom inopa mikana inoshamisa yekukura kwepurofiti.Nekudaro, zvinounzawo zvipingamupinyi zvakasarudzika zvinoda mhinduro nyowani.
Pamwoyo wekuwedzera kwepasi rose SiC chip kugadzirwa kune kugadzirwa kwemhando yepamusoro makristasi eSiC, mawafer, uye epitaxial layers.Pano,semiconductor-giredhi graphitezvinhu zvinotamba basa rakakosha, kufambisa SiC crystal kukura uye kuiswa kweSiC epitaxial layers.Graphite's thermal insulation uye inertness inoita kuti ive chinhu chinofarirwa, chinoshandiswa zvakanyanya mumacrucibles, pedestals, planetary disks, uye satellite mukati mekukura kwekristaro uye epitaxy masisitimu.Zvakadaro, maitiro akaomarara anokonzeresa dambudziko rakakura, zvichikonzera kukurumidza kuparara kwezvikamu zvegraphite uye zvichizokanganisa kugadzirwa kwemhando yepamusoro yeSiC makristasi uye epitaxial layers.
Kugadzirwa kwesilicon carbide makristasi kunosanganisira maitiro akaomarara, kusanganisira tembiricha inodarika 2000 ° C uye zvinhu zvinoparadza zvakanyanya.Izvi zvinowanzokonzera kupera kwakazara kwemagraphite crucibles mushure memaitiro akati wandei, nekudaro zvichikwira mutengo wekugadzira.Pamusoro pezvo, mamiriro akaomarara anoshandura zvimiro zvepamusoro zvezvikamu zvegraphite, zvichikanganisa kudzokorora uye kugadzikana kwemaitiro ekugadzira.
Kuti urwise matambudziko aya zvinobudirira, tekinoroji yekuvhara yekudzivirira yakabuda semutambo-kuchinja.Zvidziviriro zvekudzivirira zvichibva patantalum carbide (TaC)akaunzwa kuti agadzirise nyaya dzekuparara kwechikamu chegraphite uye kushomeka kwekupa magirafu.Zvishandiso zveTaC zvinoratidza tembiricha yekunyunguduka inodarika 3800 ° C uye yakasarudzika makemikari kuramba.Leveraging chemical vapor deposition (CVD) tekinoroji,TaC coatingsnehukobvu hunosvika 35 millimeters hunogona kuiswa zvisina musono pazvikamu zvegraphite.Iyi dura rekudzivirira haingowedzere kugadzikana kwezvinhu asiwo zvakanyanya kuwedzera hupenyu hwezvikamu zvegraphite, zvichizoderedza mutengo wekugadzira uye kuwedzera kushanda zvakanaka.
Semicera, mutungamiri anotungamira weTaC coatings, yakabatsira mukushandura indasitiri yesemiconductor.Iine tekinoroji yayo yekucheka-kumucheto uye kuzvipira kusingazungunuke kune mhando, Semicera yakagonesa vanogadzira semiconductor kukunda matambudziko akakomba uye kuwana hurefu hutsva hwebudiriro.Nekupa maTaC machira ane isingaenzaniswi mashandiro uye kuvimbika, Semicera yakasimbisa chinzvimbo chayo semubatsiri akavimbika wemakambani esemiconductor pasi rese.
Mukupedzisa, tekinoroji yekudzivirira yekuvhara, inofambiswa nehunyanzvi sengeTaC coatingskubva kuSemicera, iri kugadziridza iyo semiconductor landscape uye kugadzira nzira yeramangwana rakanaka uye rakasimba.
Nguva yekutumira: May-16-2024