Dry etching process inowanzo sanganisira mana ekutanga maitirwo: pamberi etching, chikamu etching, etching chete, uye pamusoro etching. Hunhu hukuru ndeye etching rate, selectivity, yakakosha dimension, kufanana, uye endpoint yekuona. Mufananidzo 1 Usati waisa Figure 2 Partial etching Figur...
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