Kugadzirira nzira yeakajairwa TaC yakavharwa graphite zvikamu

CHIKAMU/1
CVD (Chemical Vapor Deposition) nzira:
Pa900-2300 ℃, uchishandisa TaCl₅uye CnHm se tantalum uye kabhoni masosi, H₂ sekudzikisa mamiriro ekunze, Ar₂as inotakura gasi, reaction deposition firimu. Iyo yakagadzirwa yakagadzirwa yakagadzikana, yakafanana uye yakakwirira kuchena. Nekudaro, kune mamwe matambudziko akadai seakaomesesa maitiro, mutengo unodhura, kunetsa kuyerera kwemhepo uye kuderera kwekuisa zvakanaka.
CHIKAMU/2
Slurry sintering nzira:
Iyo slurry ine kabhoni sosi, tantalum sosi, dispersant uye binder yakaputirwa pagraphite uye yakanyungudutswa pakupisa kwakanyanya mushure mekuoma. Iyo yakagadzirwa yakagadzirwa inokura isina kutaridzika nguva dzose, ine mari shoma uye yakakodzera kugadzirwa kukuru. Inoramba ichiongororwa kuti iwane yunifomu uye yakazara yakazara pagirafu hombe, kubvisa kukanganisa kwekutsigira uye kuwedzera coating bonding simba.
CHIKAMU/3
Plasma spraying nzira:
TaC poda inonyungudutswa neplasma arc pakupisa kwepamusoro, yakanyungudutswa mumadonhwe etembiricha yakakwira nejeti inomhanya, uye yakapfapfaidzwa pamusoro pezvinhu zvegraphite. Zviri nyore kugadzira oxide layer pasi peisina-vacuum, uye kushandiswa kwesimba kwakakura.

 

Mufananidzo . Wafer tray mushure mekushandisa muGaN epitaxial yakakura MOCVD mudziyo (Veeco P75). Iyo iri kuruboshwe yakafukidzwa neTaC uye iri kurudyi yakafukidzwa neSiC.

TaC yakavharwagraphite zvikamu zvinoda kugadziriswa

CHIKAMU/1
Kusunga simba:
Iyo yekupisa yekuwedzera coefficient uye zvimwe zvemuviri zvimiro pakati peTaC nekabhoni zvinhu zvakasiyana, iyo yekubatisa yekubatanidza simba yakaderera, zvakaoma kudzivirira kuputika, pores uye kushushikana kwekupisa, uye kupfekedza kuri nyore kupepeta mumhepo chaiyo ine kuora uye. kudzokorora kusimuka uye kutonhora maitiro.
CHIKAMU/2
Kuchena:
TaC coatinginoda kuve yakanyanya-yakanyanya kuchena kudzivirira kusvibiswa uye kusvibiswa pasi pemamiriro ekushisa kwepamusoro, uye zvinobudirira zvemukati mwero uye maitiro ehunhu emahara kabhoni uye mukati mehutsvina pamusoro uye mukati meiyo yakazara coating inoda kubvumirana.
CHIKAMU/3
Kugadzikana:
Kupikisa kwekushisa kwepamusoro uye makemikari emhepo kuramba pamusoro pe2300 ℃ ndiyo inonyanya kukosha zviratidzo zvekuyedza kugadzikana kwejasi. Mapini, makatsemuka, makona akashaikwa, uye miganhu yezviyo inonamira imwechete zviri nyore kuita kuti magasi anoparadza apinde mukati uye apinde mukati megraphite, zvichikonzera kukanganisa kwekudzivirira kwekuvhara.
CHIKAMU/4
Oxidation kuramba:
TaC inotanga kuita oxidize kusvika kuTa2O5 kana iri pamusoro pe500 ℃, uye mwero weoxidation unowedzera zvakanyanya nekuwedzera kwekushisa uye oxygen concentration. Iro oxidation yepamusoro inotanga kubva kumiganhu yezviyo uye zviyo zviduku, uye zvishoma nezvishoma zvinoumba makristasi ecolumnari uye makristasi akaputsika, zvichiita kuti pave nenhamba yakawanda yemapundu nemakomba, uye kupindira kweokisijeni kunowedzera kusvikira kupfekedzwa kwabviswa. Iyo inokonzeresa oxide layer ine yakashata yekupisa conductivity uye akasiyana emavara muchitarisiko.
CHIKAMU/5
Uniformity uye roughness:
Kusaenzana kugovera kwenzvimbo yekuputira kunogona kutungamira kune yemuno kupisa kwekushushikana, kuwedzera njodzi yekutsemuka uye spalling. Pamusoro pezvo, kushata kwepamusoro kunokanganisa zvakananga kupindirana pakati pejasi uye nharaunda yekunze, uye yakawandisa roughness inotungamira nyore kune yakawedzera kupokana newafer uye isina kuenzana inopisa munda.
CHIKAMU/6
Saizi yezviyo:
Saizi yezviyo yunifomu inobatsira kugadzikana kwekupfeka. Kana chiyero chezviyo chiri chiduku, chisungo chacho hachina kusimba, uye zviri nyore kuva oxidized uye corrod, zvichiita kuti nhamba yakawanda yezvimedu uye maburi mumucheto wezviyo, iyo inoderedza kushanda kwekudzivirira kwekuputira. Kana hukuru hwezviyo hwakanyanya kukura, hunenge hwakaoma, uye kuvhara kuri nyore kuputika pasi pekunetseka kwekupisa.