Silicon carbide Nhoroondo uye Silicon Carbide Coating Chikumbiro

Iko Kuvandudza uye Mashandisirwo eSilicon Carbide (SiC)

1. Century of Innovation muSiC
Rwendo rwesilicon carbide (SiC) rwakatanga muna 1893, apo Edward Goodrich Acheson akagadzira choto cheAcheson, achishandisa kabhoni kuzadzisa kugadzirwa kwemaindasitiri kweSiC kuburikidza nekudziya kwemagetsi equartz nekabhoni. Ichi chigadzirwa chakaratidza kutanga kweSiC's industryization uye yakawana Acheson patent.

Mukutanga kwezana ramakore rechi20, SiC yainyanya kushandiswa seabrasive nekuda kwekuoma kwayo kunoshamisa uye kuramba kupfeka. Pakazosvika pakati pezana ramakore rechi20, kufambira mberi mumakemikari vapor deposition (CVD) tekinoroji yakavhura mikana mitsva. Vatsvagiri veBell Labs, vachitungamirwa naRustum Roy, vakateya hwaro hweCVD SiC, kuwana yekutanga SiC coatings pamagraphite.

Ma1970 akaona budiriro huru apo Union Carbide Corporation yakaisa SiC-yakavharwa graphite mukukura kwe epitaxial ye gallium nitride (GaN) semiconductor zvinhu. Kufambira mberi uku kwakaita basa rakakosha mukuita kwepamusoro-kuita GaN-based LEDs uye lasers. Kwemakumi emakore, maSiC machira akawedzera kupfuura semiconductors kune maapplication muaerospace, mota, uye magetsi emagetsi, nekuda kwekuvandudzwa kwehunyanzvi hwekugadzira.

Nhasi, hutsva hwakadai semafuta ekupfapfaidza, PVD, uye nanotechnology zviri kuwedzera kusimudzira kushanda uye kushandiswa kweSiC coatings, ichiratidza kugona kwayo muminda yekucheka-kumucheto.

2. Kunzwisisa SiC's Crystal Structures uye Mashandisirwo
SiC inozvirumbidza pamusoro pe200 polytypes, yakakamurwa neatomic marongero awo kuita cubic (3C), hexagonal (H), uye rhombohedral (R) zvimiro. Pakati peizvi, 4H-SiC uye 6H-SiC inoshandiswa zvakanyanya mumagetsi e-high-power uye optoelectronic, maererano, nepo β-SiC inokosheswa nokuda kwepamusoro-soro yekupisa kwekushisa, kupfeka kusagadzikana, uye kusagadzikana kwekuora.

β-SiC'syakasarudzika zvivakwa, senge thermal conductivity ye120-200 W/m·Kuye kupisa kwekuwedzera coefficient inonyatso kuenderana negraphite, ita kuti ive iyo inosarudzika zvinhu zvekupfava kwepamusoro muwafer epitaxy michina.

3. SiC Coatings: Properties uye Kugadzirira Techniques
SiC coatings, kazhinji β-SiC, inoshandiswa zvakanyanya kusimudzira zvivakwa zvepasi senge kuoma, kupfeka kuramba, uye kugadzikana kwekupisa. Nzira dzakajairika dzekugadzirira dzinosanganisira:

• Chemical Vapor Deposition (CVD):Inopa machira emhando yepamusoro ane adhesion yakanakisa uye kufanana, yakanakira yakakura uye yakaoma substrates.
• Physical Vapor Deposition (PVD):Inopa kutonga kwakaringana pamusoro pekugadzirisa kuumbwa, kwakakodzera kune yakakwirira-chaiyo maapplication.
• Kupfapfaidza Tekinoroji, Electrochemical Deposition, uye Slurry Coating: Shanda sedzimwe nzira dzinodhura dzemashandisirwo chaiwo, kunyangwe paine zvipimo zvakasiyana mukunamatira uye kufanana.

Imwe neimwe nzira inosarudzwa zvichienderana neiyo substrate maitiro uye zvinodiwa zvekushandisa.

4. SiC-Coated Graphite Susceptors muMOCVD
SiC-yakavharidzirwa graphite susceptors yakakosha muMetal Organic Chemical Vapor Deposition (MOCVD), maitiro akakosha mukugadzira semiconductor uye optoelectronic zvinhu.

Aya ma susceptors anopa rutsigiro rwakasimba rwekukura kwemafirimu epitaxial, kuve nechokwadi chekugadzikana kwemafuta uye kuderedza kusvibiswa kwetsvina. Iyo SiC coating inowedzerawo oxidation kuramba, zvivakwa zvepasi, uye interface yemhando, ichigonesa kutonga chaiko panguva yekukura kwefirimu.

5. Kuenda Kumberi
Mumakore achangopfuura, kuedza kwakakosha kwakanangidzirwa pakuvandudza maitiro ekugadzira eSiC-coated graphite substrates. Vatsvaguri vari kutarisa nezve kusimudzira kuchena kwejasi, kufanana, uye hupenyu hwehupenyu uku vachideredza mitengo. Uyezve, kuongororwa kwezvinhu zvitsva zvakadaitantalum carbide (TaC) machirainopa kuvandudzwa kunogona kuitika mukupisa kwekupisa uye kusagadzikana kwekuora, kugadzira nzira yemhinduro dzechizvarwa chinotevera.

Sezvo kudiwa kweSiC-yakavharwa graphite susceptors kuri kuramba kuchikura, kufambira mberi mukugadzira kwakangwara uye kugadzirwa kwemaindasitiri kunoenderera mberi kutsigira kuvandudzwa kwezvigadzirwa zvemhando yepamusoro kuti zvizadzise zvinodikanwa zvesemiconductor uye optoelectronics maindasitiri.