Iyo Yakanakisa Kuita kweSilicon Carbide Wafer Boats muCrystal Kukura

Maitiro ekukura kweCrystal ari pamwoyo wekugadzira semiconductor, uko kugadzirwa kwemhando yepamusoro-wafers kwakakosha. Chinhu chakakosha muzvirongwa izvi ndeyesilicon carbide (SiC) chikepe chepfu. SiC wafer mabhoti akawana mukurumbira muindasitiri nekuda kwekuita kwavo kwakasiyana uye kuvimbika. Muchikamu chino, tichaongorora hunhu hunoshamisa hweSiC wafer mabhotiuye basa ravo mukufambisa kukura kwekristaro mukugadzira semiconductor.

SiC wafer mabhotidzakagadzirirwa chaizvo kubata uye kutakura semiconductor wafers panguva dzakasiyana siyana dzekukura kwekristaro. Sechinhu, silicon carbide inopa yakasarudzika musanganiswa wezvinhu zvinodikanwa izvo zvinoita kuti ive sarudzo yakanaka yezvikepe zvewafer. Chokutanga uye chinonyanya kukosha ndeyesimba rayo rakatanhamara remagetsi uye kugadzikana kwepamusoro-tembiricha. SiC inozvirumbidza kuomarara uye kuomarara, ichiibvumira kumirisana nemamiriro akanyanya kusangana panguva yekukura kwekristaro maitiro.

Imwe yakakosha mukana weSiC wafer mabhotindiyo yakasarudzika yekupisa conductivity. Kupisa kupisa chinhu chakakosha mukukura kwekristaro, sezvo inokanganisa kuenzana kwetembiricha uye inodzivirira kushushikana kwemafuta pamawaferi. SiC's high thermal conductivity inofambisa kufambisa kupisa kwakanaka, kuve nechokwadi chekugovera tembiricha yakatenderedza pamawafers. Hunhu uhwu hunonyanya kubatsira mumatanho senge epitaxial kukura, uko kunyatso kudzora tembiricha kwakakosha kuti uwane yunifomu yekuisa firimu.

Uyezve,SiC wafer mabhotikuratidza yakanakisa makemikari inertness. Izvo zvinopesana nemhando dzakasiyana dzemakemikari anoparadza uye magasi anowanzoshandiswa mukugadzira semiconductor. Uku kugadzikana kwemakemikari kunovimbisa izvozvoSiC wafer mabhotichengetedza kutendeseka kwavo uye kuita kwavo pamusoro pekuratidzwa kwenguva refu kune dzakaomarara maitiro nharaunda. kuramba kurwiswa kwemakemikari kunodzivirira kusvibiswa uye kuparara kwezvinhu, kuchengetedza mhando yewafers ari kukura.

Iyo dimensional kugadzikana kweSiC wafer mabhoti chimwe chinhu chakakosha. Izvo zvakagadzirirwa kuchengetedza chimiro chavo uye chimiro kunyangwe pasi pekupisa kwakanyanya, kuve nechokwadi chekumisikidzwa kwemawafer panguva yekukura kwekristaro. Iyo dimensional kugadzikana inoderedza chero deformation kana kutenderera kwechikepe, izvo zvinogona kutungamira mukusarongeka kana kukura kusiri-uniform pamawafers. Iyi chaiyo yekumisikidza yakakosha pakuwana inodiwa yecrystallographic orientation uye kufanana mune inoguma semiconductor zvinhu.

SiC wafer mabhoti anopawo yakanakisa magetsi zvivakwa. Silicon carbide ndeye semiconductor zvinhu pachayo, inoratidzwa nehupamhi bhendi gap uye yakakwira breakdown voltage. Iwo ega emagetsi zvimiro zveSiC anovimbisa kushoma kwemagetsi kubuda uye kupindira panguva yekukura kwekristaro maitiro. Izvi zvinonyanya kukosha kana uchikura midziyo yemagetsi-yakakwirira kana kushanda neyakaomesesa zvimiro zvemagetsi, sezvo zvichibatsira kuchengetedza kutendeseka kwezvinhu zvesemiconductor zviri kugadzirwa.

Pamusoro pezvo, zvikepe zveSiC wafer zvinozivikanwa nekurebesa kwavo uye kushandiswazve. Vane hupenyu hurefu hwekushanda, nekukwanisa kutsungirira akawanda makristasi ekukura kutenderera pasina kuderera kwakanyanya. Kugara uku kunoshandura kuita mutengo-kushanda uye kunoderedza kudiwa kwekugara uchitsiva. Iko reusability yeSiC wafer mabhoti haingobatsiri chete kune yakagadzikana yekugadzira maitiro asi zvakare inovimbisa kuenderana kuita uye kuvimbika mukukura kwekristaro maitiro.

Mukupedzisa, SiC wafer mabhoti ave chinhu chakakosha mukukura kwekristaro yekugadzira semiconductor. Simba ravo rakasiyana-siyana remagetsi, kugadzikana kwepamusoro-tembiricha, kupisa kwemhepo, makemikari inertness, kugadzikana kwedimensional, uye zvinhu zvemagetsi zvinoita kuti zvive zvakanyanya kudiwa mukufambisa maitiro ekukura kwekristaro. SiC wafer mabhoti anovimbisa kugovera tembiricha yakafanana, kudzivirira kusvibiswa, uye kugonesa kunyatsomira kwewafers, zvinozotungamira mukugadzirwa kwemhando yepamusoro semiconductor zvinhu. Sezvo kudiwa kwemidziyo yemhando yepamusoro semiconductor kuri kuramba kuchikwira, kukosha kweSiC wafer mabhoti mukuwana yakakwana kukura kwekristaro hakugone kuwedzeredzwa.