Kuchena kwewafer surfaceichakanganisa zvakanyanya mwero wekufanirwa weanotevera semiconductor maitiro uye zvigadzirwa. Kusvika pa50% yezvose zvinorasikirwa negoho zvinokonzerwa newafer surfacekusvibiswa.
Zvinhu zvinogona kukonzera kushanduka kusingadzoreki mukushanda kwemagetsi kwechigadzirwa kana chigadziro chekugadzira zvigadzirwa zvinosanganiswa zvinonzi zvinosvibisa. Zvinosvibisa zvinogona kubva pawafer pachayo, mukamuri rakachena, maturusi ekugadzira, kugadzira makemikari kana mvura.Waferkusvibiswa kunogona kuwanzo kuwonekwa nekutarisa kwekuona, kuongorora maitiro, kana kushandiswa kwemidziyo yakaoma yekuongorora muyedzo yekupedzisira yemudziyo.
▲ Zvinosvibisa pamusoro pesilicon wafers | Image source network
Mhedzisiro yekuongorora kusvibiswa inogona kushandiswa kuratidza dhigirii uye rudzi rwekusvibiswa kwakasangana newafermune imwe danho rekuita, muchina chaiwo kana maitiro ese. Zvinoenderana nemhando yenzira dzekuona,wafer surfacekusvibiswa kunogona kugoverwa mumhando dzinotevera.
Metal kusvibiswa
Kusvibiswa kunokonzerwa nesimbi kunogona kukonzera semiconductor mudziyo kuremara kwemadhigirii akasiyana.
Alkali simbi kana alkaline pasi simbi (Li, Na, K, Ca, Mg, Ba, nezvimwewo) inogona kukonzera kuvuza ikozvino mune pn chimiro, izvo zvinozotungamira kune kuparara kwemagetsi eoxide; shanduko yesimbi uye heavy metal (Fe, Cr, Ni, Cu, Au, Mn, Pb, etc.) kusvibiswa kunogona kuderedza hupenyu hwekutakura, kuderedza hupenyu hwebasa rechikamu kana kuwedzera rima ikozvino apo chikamu chiri kushanda.
Nzira dzakajairika dzekuona kusvibiswa kwesimbi inoratidzira yakazara X-ray fluorescence, atomic absorption spectroscopy uye inductively yakabatana plasma mass spectrometry (ICP-MS).
▲ Wafer pamusoro kusvibiswa | ResearchGate
Kusvibiswa kwesimbi kunogona kubva kune mareagents anoshandiswa mukuchenesa, etching, lithography, deposition, nezvimwewo, kana kubva kumashini anoshandiswa mukuita, senge oveni, mareactor, ion implantation, nezvimwewo, kana zvinogona kukonzerwa nekusachengeta wafer kubata.
Particle kusvibiswa
Chaicho madhipoziti emidziyo anowanzo kucherechedzwa nekuona mwenje wakapararira kubva pamusoro pehurema. Naizvozvo, iro zita resainzi rakanyatsojeka rekuti particle contamination is light-point defect. Particle kusvibiswa kunogona kukonzera kuvharika kana masking mhedzisiro mune etching uye lithography maitiro.
Munguva yekukura kwemafirimu kana kuiswa, pinholes uye microvoids inogadzirwa, uye kana zvimedu zvakakura uye zvinoitisa, zvinogona kukonzera mapfupi maseketi.
▲ Kugadzirwa kwekusvibiswa kwechikamu | Image source network
Tiny particle kusvibiswa kunogona kukonzera mimvuri pamusoro, senge panguva yephotolithography. Kana zvimedu zvakakura zviri pakati pe photomask uye photoresist layer, zvinogona kuderedza kugadziriswa kwekutarisana.
Mukuwedzera, ivo vanogona kuvhara kukurumidza ions panguva yekuisirwa ion kana yakaoma etching. Zvimedu zvinogonawo kuvharwa nefirimu, kuitira kuti pave nemapundu nemapundu. Anotevera akaiswa maseketi anogona kutsemuka kana kuramba kuungana panzvimbo idzi, zvichikonzera matambudziko panguva yekuratidzwa.
Organic kusvibiswa
Zvinosvibisa zvine kabhoni, pamwe nekubatanidza zvimiro zvine chekuita neC, zvinonzi organic contamination. Organic zvinosvibisa zvinogona kukonzera zvisingatarisirwi hydrophobic zvimiro panewafer surface, kuwedzera kushata kwepamusoro, kuburitsa nzvimbo ine hazy, kukanganisa epitaxial layer kukura, uye kukanganisa kuchenesa mhedzisiro yekusvibiswa kwesimbi kana zvakasvibiswa zvikasatanga kubviswa.
Kusvibiswa kwepamusoro kwakadai kunowanzo onekwa nezviridzwa senge thermal desorption MS, X-ray photoelectron spectroscopy, uye Auger electron spectroscopy.
▲Mufananidzo sosi network
Kusvibiswa kwegasi uye kusvibiswa kwemvura
Mamolekemu emumhepo uye kusvibiswa kwemvura nehukuru hwemamorekuru kazhinji haabviswe neyakajairwa yakakwira-inoshanda particulate mweya (HEPA) kana Ultra-yakaderera penetration air mafirita (ULPA). Kusvibiswa kwakadaro kunowanzotariswa neion mass spectrometry uye capillary electrophoresis.
Zvimwe zvinosvibisa zvinogona kunge zviri zvemapoka akati wandei, semuenzaniso, zvimedu zvinogona kunge zvakaumbwa nezvinhu zvesimbi kana zvesimbi, kana zvese zviri zviviri, saka rudzi urwu rwekusvibiswa runogonawo kuiswa semamwe marudzi.
▲Gaseous molecular contaminants | IONICON
Pamusoro pezvo, kusvibiswa kwewafer kunogonawo kuverengerwa sekusvibiswa kwemamorekuru, kusvibiswa kwechikamu, uye kusvibiswa-kunobva kumarara kunoenderana nehukuru hwenzvimbo yekusvibiswa. Iyo diki saizi yekusvibisa particle, zvakanyanya kuoma kubvisa. Mukugadzirwa kwemazuva ano kwemagetsi, nzira dzekuchenesa wafer dzinoita 30% - 40% yezvese maitiro ekugadzira.
▲ Zvinosvibisa pamusoro pesilicon wafers | Image source network
Nguva yekutumira: Nov-18-2024