Ndeapi matanho makuru mukugadziriswa kweSiC substrates?

Magadzirirwo atinoita-matanho ekugadzirisa eSiC substrates ndeaya anotevera:

1. Crystal Oientation: Kushandisa X-ray diffraction kuti utarise ingot yekristaro. Kana X-ray danda inonangidzirwa kune inodiwa kristaro kumeso, kona yedanda rakakanganiswa rinotarisa kutaridzika kwekristaro.

2. Outer Diameter Kukuya: Single crystals yakakura mu graphite crucibles inowanzopfuura madhayamita akaenzana. Kukuya kwekunze kwedhayamita kunodzikisira kusvika kumasaizi akajairwa.

 

3.End Face Grinding: 4-inch 4H-SiC substrates inowanzova nemakona maviri ekumisa, yekutanga uye yechipiri. Kupedza chiso kukuya kunovhura aya ekumisa micheto.

4. Wire Sawing: Kucheka waya inhanho yakakosha mukugadzirisa 4H-SiC substrates. Mitswe uye kukuvara kwepasi-pasi kunokonzerwa panguva yekuona waya zvinokanganisa maitiro anotevera, kuwedzera nguva yekugadzirisa uye kukonzera kurasikirwa kwezvinhu. Nzira yakajairika ndeye multi-waya sawing ine diamond abrasive. Kudzokororwa kwekufamba kwewaya dzesimbi dzakasungwa nedhaimani abrasives inoshandiswa kucheka ingot ye4H-SiC.

5. Chamfering: Kudzivirira edge chipping uye kuderedza kurasikirwa kunodyiwa panguva dzinotevera maitiro, inopinza mipendero yemachipisi ewaya-sawn inokwenenzverwa kune yakatsanangurwa maumbirwo.

6. Kuonda: Kucheka newaya kunosiya makwara akawanda uye kukuvara kwepasi-pasi. Kutetepa kunoitwa uchishandisa mavhiri edhaimani kubvisa zvirema izvi zvakanyanya sezvinobvira.

7. Kukuya: Izvi zvinosanganisira kugaya nekugaya zvakanaka uchishandisa madiki-saizi boron carbide kana madhaimondi abrasives kuti abvise kukuvara kwasara uye kukuvadza kutsva kunounzwa panguva yekuonda.

8. Kupenya: Matanho ekupedzisira anosanganisira kupenya kwakakasharara uye kupenya kwakanaka uchishandisa alumina kana silicon oxide abrasives. Mvura inopenya inopfavisa pamusoro, iyo inobva yabviswa nemagetsi nemaabrasives. Iyi nhanho inochengetedza nzvimbo yakatsetseka uye isina kukuvara.

9. Kuchenesa: Kubvisa zvimedu, simbi, oxide mafirimu, organic residues, uye zvimwe zvakasvibiswa zvakasara kubva pamatanho ekugadzirisa.