Ndeapi matanho makuru mukugadziriswa kweSiC substrates?

 

Magadzirirwo atinoita-matanho ekugadzirisa eSiC substrates ndeaya anotevera:

 

1. Crystal Oientation:

Kushandisa X-ray diffraction kutungamira iyo ingot yekristaro. Kana X-ray danda inonangidzirwa kune inodiwa kristaro kumeso, kona yedanda rakakanganiswa rinotarisa kutaridzika kwekristaro.

 

2. Kukuya Kwekunze Kwedhayamita:

Single makristasi anokura mu graphite crucibles anowanzopfuura madhiyamita akajairwa. Kukuya kwekunze kwedhayamita kunodzikisira kusvika kumasaizi akajairwa.

 

 

3.Pedzisa Kukuya Kuso:

4-inch 4H-SiC ma substrates anowanzo ane maviri ekumisikidza mipendero, yekutanga uye yechipiri. Kupedza chiso kukuya kunovhura aya ekumisa micheto.

 

4. Wire Sawing:

Kucheka waya inhanho yakakosha mukugadzirisa 4H-SiC substrates. Mitswe uye kukuvara kwepasi-pasi kunokonzerwa panguva yekuona waya zvinokanganisa maitiro anotevera, kuwedzera nguva yekugadzirisa uye kukonzera kurasikirwa kwezvinhu. Nzira yakajairika ndeye multi-waya sawing ine diamond abrasive. Kudzokororwa kwekufamba kwewaya dzesimbi dzakasungwa nedhaimani abrasives inoshandiswa kucheka ingot ye4H-SiC.

 

5. Chamfering:

Kuti udzivise kucheka kwemupendero uye kuderedza kurasikirwa kunodyiwa panguva dzinotevera maitiro, mipendero yakapinza yewaya-sawn machipisi anokwenenzverwa kune akatsanangurwa maumbirwo.

 

6. Kuonda:

Wire sawing inosiya makwara akawanda uye sub-surface kukuvara. Kutetepa kunoitwa uchishandisa mavhiri edhaimani kubvisa zvirema izvi zvakanyanya sezvinobvira.

 

7. Kukuya:

Kuita uku kunosanganisira kugaya nekukuya zvakanaka uchishandisa diki-saizi boron carbide kana mabrasives edhaimani kubvisa kukuvara kwasara uye kukuvara kutsva kunounzwa panguva yekuonda.

 

8. Kupenya:

Matanho ekupedzisira anosanganisira kukwenenzverwa uye kupenya kwakanaka uchishandisa alumina kana silicon oxide abrasives. Mvura inopenya inopfavisa pamusoro, iyo inobva yabviswa nemagetsi nemaabrasives. Iyi nhanho inochengetedza nzvimbo yakatsetseka uye isina kukuvara.

 

9. Kuchenesa:

Kubvisa zvimedu, simbi, oxide mafirimu, organic residues, uye zvimwe zvinosvibisa zvakasara kubva pamatanho ekugadzirisa.