Chii chinonzi Epi Carrier?

Kuongorora Basa Rayo Rakakosha muEpitaxial Wafer Processing

Kunzwisisa Kukosha kweEpi Vatakuri muAdvanced Semiconductor Manufacturing

Muindasitiri yesemiconductor, kugadzirwa kweyepamusoro-mhando epitaxial (epi)zvimeduinhanho yakakosha mukugadzira zvishandiso senge transistors, diode, uye zvimwe zvinhu zvemagetsi. Pakati pekuita uku ndikoepi mutakuri, chishandiso chakasarudzika chakagadzirirwa kuchengetedza mawafers zvakachengeteka panguva yekuiswa epitaxial. Asi chii chaizvo chinonzi epi carrier, uye nei zvakakosha pakugadzira semiconductor?

Epitaxial Kukura: Nzira Yakakosha muSemiconductor Fabrication

Epitaxial kukura, kana epitaxy, inoreva maitiro ekuisa chidimbu chakatetepa checrystalline zvinhu pane semiconductor wafer. Iyi layer, inozivikanwa se epitaxial layer, ine yakafanana crystal orientation seyakadzika substrate uye inoshandiswa kuwedzera magetsi eiyo wafer. Epitaxy yakakosha mukugadzira zvigadziriso zvemhando yepamusoro zvinoda kutonga chaiko pamusoro pekuumbwa kwezvinhu uye chimiro.

Kuti uwane hutano hunodiwa uye kufanana mune epitaxial layer, mawaferi anofanirwa kubatwa munzvimbo nemazvo uye kugadzikana panguva yekuisa. Apa ndipo paneepi mutakuriinopinda mukutamba.

Basa reEpi Carrier

An epi mutakurichigadziriso chakanyatsogadzirwa chinobata wafers panguva ye epitaxial deposition process. Inowanzo gadzirwa kubva kune-yakachena-yakachena zvinhu zvinokwanisa kumira kutonhora kwepamusoro uye nzvimbo dzinoshanda dzinobatanidzwa mu epitaxy. Magadzirirwo emutakuri anovimbisa kuti mawafer akachengetedzwa zvakachengetedzeka uye zvakaenzana kuratidzwa kune deposition zvinhu, zvichikonzera yunifomu epitaxial layer pane yese wafer surface.

Rimwe remabasa ekutanga epi mutakuri kuchengetedzawafer'skugadzikana uye kurongeka mukati meiyo deposition process. Chero kufamba kana kukanganisa kunogona kutungamirira kune kukanganisa mu epitaxial layer, iyo inogona kukanganisa zvakanyanya kushanda kwekupedzisira semiconductor device. Mutakuri anofanirawo kudzivirira kusvibiswa uye kuona kuti wafers anoramba asina zvidimbu kana tsvina panguva yekugadzirisa.

SeiEpi VatakuriIzvo zvakakosha muSemiconductor Manufacturing

Hunhu hweiyo epitaxial layer inokanganisa zvakananga kushanda kwesemiconductor zvishandiso. Saka nekudaro, basa remutakuri we epi rakakosha mukuzadzisa zviyero zvepamusoro zvinodikanwa muindasitiri. Nekupa nzvimbo yakagadzikana uye inodzorwa yekugadziriswa kwewafer, iyo epi inotakura inova nechokwadi chekuti epitaxial layer inoiswa zvakafanana uye isina kukanganisa.

Epi vatakuri vakakoshawo mukutsigira scalability yekugadzira semiconductor. Sezvo mudziyo geometries unoramba uchidzikira uye kudiwa kwekuita kwepamusoro kuchikura, kudiwa kweiyo chaiyo uye yakavimbika epitaxial maitiro inotonyanya kukosha. Yepamusoro-mhando epi vatakuri vanobatsira vagadziri kuzadzisa izvi zvinodikanwa nekugonesa zvinoenderana uye zvinogoneka mhedzisiro, kunyangwe kugadzirwa kunokwira.

Mhedziso

Muchidimbu, iyo epi inotakura chishandiso chakakosha mukugadzira semiconductor, kunyanya mukugadzirwa kweepitaxial wafers. Basa rayo mukuona kugadzikana kwewafer, kurongeka, uye kudzora kusvibiswa kwakakosha kuti uwane epamusoro-mhando epitaxial layers inodiwa kune yepamusoro semiconductor zvishandiso. Sezvo indasitiri inoenderera mberi nekusundira miganhu yetekinoroji, kukosha kweakavimbika uye anoshanda epi vatakuri kuchawedzera chete, zvichiita kuti ive chinhu chakakosha mukutsvaga kugona mukugadzira semiconductor.

Kune avo vari muindasitiri yesemiconductor vanotarisa kukwidziridza maitiro avo epitaxial, kunzwisisa nekudyara mumhando yepamusoro epi vatakuri inhanho yakakosha yekuwana mhedzisiro iri nani uye kuchengetedza mutsetse wemakwikwi mumusika.