Chii chinonzi Epi Pan Carrier?

Iyo semiconductor indasitiri inotsamira pamichina yakasarudzika kugadzira emhando yepamusoro zvigadzirwa zvemagetsi. Chimwe chinhu chakakosha kudaro mukukura kwe epitaxial ndiyo epi pan carrier. Ichi chishandiso chinoita basa rakakosha mukuiswa kweepitaxial layers pane semiconductor wafers, kuve nechokwadi chekufanana uye kunaka kwechigadzirwa chekupedzisira.

Epi pan carrier, inozivikanwawo seepitaxy pan carrier, itireyi yakanyatsogadzirwa inoshandiswa mukukura kwe epitaxial. Inobata uye inotsigira semiconductor wafers panguva yekuiswa kwe epitaxial layers. Aya mavatakuri akagadzirwa kuti akwanise kushingirira tembiricha yakakwira uye nharaunda dzinoora dzakajairwa nemaitiro epitaxial, zvichipa chikuva chakagadzikana chekukura kweimwe-crystal layers.

Zvishandiso uye Kuvaka:

Epi pani inotakura anowanzo gadzirwa kubva kumidziyo inogona kutsungirira tembiricha yakanyanyisa uye inoshingirira kuita kwemakemikari. Zvishandiso zvakajairika zvinosanganisira:

•Silicon Carbide (SiC): Inozivikanwa nekukwira kwayo kwekushisa conductivity uye kuramba kupfeka uye oxidation, SiC isarudzo yakakurumbira kune epi pan vatakuri.

• Graphite: Inowanzo shandiswa nekuda kwekunaka kwayo kwekushisa uye kukwanisa kuchengetedza kutendeseka kwemaitiro pakupisa kwepamusoro. Vatakuri ve graphite vanowanzo putirwa neSiC kuti vawedzere kusimba kwavo uye kuramba kune ngura.

Basa muEpitaxial Growth process:

Iyo epitaxial yekukura maitiro inosanganisira kuiswa kweiyo nhete yekristaro zvinhu pane substrate kana wafer. Iyi nzira yakakosha mukugadzira semiconductor zvishandiso zvine chaiwo magetsi emagetsi. Iyo epi pani inotakura inotsigira wafer mukamuri yekupindura uye inoita kuti irambe yakagadzikana panguva yekuisa.

Mabasa akakosha eepi pan carrier anosanganisira:

• Uniform Heat Distribution: Mutakuri anovimbisa kunyangwe kupisa kupararira mukati mewafer, izvo zvakakosha pakubudirira kunoenderana epitaxial layer gobvu uye kunaka.

• Kemikari Isolation: Nekupa nzvimbo yakagadzikana uye inert, mutakuri anodzivirira zvisingadiwi makemikari maitiro anogona kukanganisa kunaka kwe epitaxial layer.

Zvakanakira Zvemhando yepamusoroEpi Pan Vatakuri:

• Kuvandudzwa Kwekushanda Kwechishandiso: Uniform epitaxial layers inobatsira pakushanda kwepamusoro kwezvigadzirwa zve semiconductor, zvichiita kuti zvive nani uye kuvimbika.

• Kuwedzera Goho: Nekudzikisa kuremara uye nekuona kuti mayunifomu akaturikidzana, vatakuri vemhando yepamusoro vanovandudza goho remasemiconductor anoshandiswa.

• Kuderedzwa Kwemari Yekuchengetedza: Zvinhu zvinogara kwenguva refu uye mainjiniya chaiwo zvinoderedza kudiwa kwekugarotsiva uye kugadzirisa, zvichidzikisa mutengo wekugadzira.

Iyo epi pani inotakura chinhu chakakosha muiyo epitaxial yekukura maitiro, ichipesvedzera zvakananga kunaka uye kuenderana kwesemiconductor zvishandiso. Nekusarudza zvinhu zvakanaka uye dhizaini, vagadziri vanogona kukwidziridza iyo epitaxial maitiro, zvichitungamira kune yakagadziridzwa mashandiro echishandiso uye kuderedzwa kwemitengo yekugadzira. Sezvo kudiwa kwezvigadzirwa zvemagetsi zvepamberi zvichikura, kukosha kwemhando yepamusoroepi pan vatakurimune semiconductor indasitiri inoramba ichiwedzera.