Chii chinonzi RTP Wafer Carrier?

Kunzwisisa Basa Rayo muSemiconductor Manufacturing

Kuongorora Basa Rinokosha reRTP Wafer Vatakurimu Advanced Semiconductor Processing

Munyika yekugadzira semiconductor, kunyatsoita uye kutonga kwakakosha pakugadzira michina yemhando yepamusoro inosimbisa magetsi emazuva ano. Chimwe chezvinhu zvakakosha mukuita uku ndikoRTP Wafer Mutakuri. Asi chii chaizvo chinonzi RTP wafer carrier, uye nei yakakosha?

Kunzwisisa Rapid Thermal Processing (RTP)

Kunzwisisa zvizere kukosha kweRTP wafer mutakuri, zvakakosha kutanga kuti unzwisise kuti chii chinonzi rapid thermal processing (RTP). RTP inzira yekugadzira semiconductor inoshandiswa kupisa silicon wafers kusvika pakupisa kwakanyanya munguva pfupi pfupi. Maitiro aya akakosha kune akasiyana maapplication, anosanganisira dopant activation, oxidation, uye annealing, ese ari matanho akakosha mukugadzirwa kwesemiconductor zvishandiso.

RTP inopa akati wandei mabhenefiti pamusoro pechinyakare maitiro ekupisa, senge kuderedzwa kwekugadzirisa nguva uye kugona kunyatso kudzora tembiricha profiles. Nekudaro, mabhenefiti aya anouyawo nematambudziko, kunyanya mukuchengetedza kutendeseka uye mhando yewafers panguva yekukurumidza kupisa uye kutonhora kutenderera. Apa ndipo apo RTP wafer carrier inoita basa rakakosha.

Basa re anRTP Wafer Mutakuri

An RTP wafer mutakurichishandiso chakanyatsogadzirwa chinobata silicon wafers zvakachengeteka munzvimbo panguva yekukurumidza kupisa kwekupisa. Iyo inogadzirwa kuti imirire tembiricha yakanyanyisa uye nekukurumidza tembiricha shanduko inoitika panguva yeRTP. Mutakuri anofanirwa kuve nechokwadi chekugovera kupisa kwakafanana pane yawafer pamusoro kudzivirira kupisa kwemagetsi izvo zvinogona kukonzera kuremara kana kusiyanisa mune semiconductor zvinhu.

Iyo RTP wafer inotakura inowanzo gadzirwa kubva kune yakakwira-kuchena zvinhu izvo zvinokwanisa kuramba kuvhunduka uye kudzivirira kusvibiswa kwewafer. Zvinhu izvi zvinosarudzwa nokuda kwekukwanisa kwavo kuchengetedza kugadzikana uye kuvimbika kunyange pasi pemamiriro ezvinhu anonyanya kudiwa. Dhizaini yemutakuri yakakoshawo, sezvo ichifanirwa kugashira saizi chaiyo uye chimiro chewafers ichibvumira kuenderana kwekupisa kwekusangana uye kutsigirwa.

Nei RTP Wafer Vatakuri Yakakosha

Basa reRTP wafer carrier rinonyanya kukosha mukuwana mhedzisiro inodiwa mukukurumidza kupisa kwekupisa. Pasina mutakuri wemhando yepamusoro, wafers anogona kusangana nekudziya kusina kuenzana, zvichitungamira kune hurema hunokanganisa kuita kweyekupedzisira semiconductor zvishandiso. Nekuona yunifomu yekugovera tembiricha uye kuchengetedza wafer kubva mukupisa kwekushushikana, iyo RTP wafer carrier inobatsira kuchengetedza kunaka uye kuvimbika kwezvigadzirwa zve semiconductor.

Uyezve, sezvo semiconductor zvishandiso zvinoramba zvichidzikira muhukuru uye kuwedzera mukuoma, kudiwa kwechokwadi mukupisa kwekupisa kunotonyanya kukosha. RTP wafer vatakuri vanofanirwa kushanduka kuti vasangane nezvinetswa izvi, vachipa rubatsiro runodiwa kubata zvakanyanya kutetepa uye zvakaoma wafer zvimiro.

Mhedziso

Muchidimbu, iyo RTP wafer carrier chinhu chakakosha mukuita semiconductor yekugadzira, kunyanya mukukurumidza kupisa kwemafuta. Basa rayo mukuona kupisa kweyunifomu, kuchengetedza mawafer kubva mukupisa kwekushushikana, uye kudzivirira kusvibiswa kwakakosha mukugadzira emhando yepamusoro semiconductor zvishandiso. Sezvo tekinoroji ichienderera mberi, kukosha kweakavimbika uye anoshanda RTP wafer vatakuri vanongokura, vachivaita chikamu chakakosha cheiyo semiconductor yekugadzira maturusi.

Kune avo vari muindasitiri yesemiconductor vari kutsvaga kukwidziridza maitiro avo eRTP, kunzwisisa nekudyara mumhando yepamusoro yeRTP wafer vatakuri inhanho yakakosha yekuwana mhedzisiro iri nani uye kuchengetedza muganho wemakwikwi.