Chii chinonzi epitaxy?

Mainjiniya mazhinji havana kujairaepitaxy, iyo inoita basa rinokosha mukugadzira semiconductor device.Epitaxyinogona kushandiswa mune zvakasiyana chip zvigadzirwa, uye zvigadzirwa zvakasiyana zvine marudzi akasiyana epitaxy, kusanganisiraSi epitaxy, SiC epitaxy, GaN epitaxy, nezvimwewo.

Chii chinonzi epitaxy?
Epitaxy inowanzonzi "Epitaxy" muChirungu. Shoko racho rinobva pashoko rechiGiriki rokuti “epi” (rinoreva kuti “pamusoro”) uye “matekisi” (zvinoreva kuti “gadziriro”). Sezvinoratidzwa nezita racho, zvinoreva kuronga zvakanaka pamusoro pechinhu. Iyo epitaxy maitiro ndeyekuisa yakaonda imwechete crystal layer pane imwechete crystal substrate. Iyi ichangobva kuiswa crystal layer inonzi epitaxial layer.

Kune mhando mbiri huru dze epitaxy: homoepitaxial uye heteroepitaxial. Homoepitaxial zvinoreva kukura chinhu chimwe chete pamhando imwechete ye substrate. Iyo epitaxial layer uye substrate ine chaiyo yakafanana lattice chimiro. Heteroepitaxy ndiko kukura kwechimwe chinhu pane substrate yechinhu chimwe. Muchiitiko ichi, iyo lattice chimiro che epitaxially yakakura crystal layer uye substrate inogona kunge yakasiyana. Chii chinonzi makristasi chete uye polycrystalline?
Mune semiconductors, tinowanzonzwa mazwi ekuti single crystal silicon uye polycrystalline silicon. Sei mamwe silicon achinzi single crystals uye mamwe silicon anonzi polycrystalline?

Single crystal: Kurongeka kwelatiti kunoenderera mberi uye kusingashanduki, pasina miganhu yezviyo, kureva kuti, kristaro yose inoumbwa nereti imwe chete ine crystal oientation. Polycrystalline: Polycrystalline inoumbwa nezviyo zvakawanda zvidiki, imwe neimwe iine kristaro imwe chete, uye maitiro avo anongoitika zvine ruremekedzo kune mumwe nemumwe. Zviyo izvi zvinoparadzaniswa nemiganhu yezviyo. Mutengo wekugadzirwa kwezvinhu zvepolycrystalline wakaderera pane wekristaro imwechete, saka iwo achiri kubatsira mune mamwe maapplication. Ko iyo epitaxial process ichabatanidzwa kupi?
Mukugadzirwa kwesilicon-based integrated circuits, iyo epitaxial process inoshandiswa zvakanyanya. Semuyenzaniso, silicon epitaxy inoshandiswa kukura yakachena uye yakanyatso dzorwa silicon layer pane silicon substrate, iyo yakakosha zvakanyanya pakugadzira epamberi akabatanidzwa maseketi. Pamusoro pezvo, mumidziyo yemagetsi, SiC neGaN maviri anowanzo shandiswa yakafara bandgap semiconductor zvinhu zvine simba rakanakisa rekubata masimba. Zvinhu izvi zvinowanzokura pasilicon kana mamwe ma substrates kuburikidza ne epitaxy. Mukutaurirana kwehuwandu, semiconductor-based quantum bits inowanzo shandisa silicon germanium epitaxial zvimiro. Etc.

Nzira dzekukura kwe epitaxial?

Nzira nhatu dzinowanzo shandiswa semiconductor epitaxy:

Molecular beam epitaxy (MBE): Molecular beam epitaxy) inonzi semiconductor epitaxial kukura tekinoroji inoitwa pasi pe-ultra-high vacuum mamiriro. Mune tekinoroji iyi, iyo sosi yezvinyorwa inonyungudutswa muchimiro chemaatomu kana mamorekuru matanda uye yozoiswa pane yekristaro substrate. MBE ndeye chaiyo uye inodzoreka semiconductor mutete firimu kukura tekinoroji inogona kunyatso kudzora ukobvu hwezvinhu zvakaiswa padanho reatomu.

Metal organic CVD (MOCVD): Muchiitiko cheMOCVD, organic metals uye hydride magasi ane zvinhu zvinodiwa zvinopihwa kune substrate pane tembiricha yakakodzera, uye izvo zvinodiwa semiconductor zvinhu zvinogadzirwa kuburikidza nekuita kwemakemikari uye zvinoiswa pane substrate, nepo zvakasara. macompounds uye reaction products zvinobviswa.

Vapor Phase Epitaxy (VPE): Vapor Phase Epitaxy ndiyo tekinoroji yakakosha inowanzoshandiswa mukugadzira michina yesemiconductor. Musimboti wayo mukuru kutakura mhute yechinhu chimwe chete kana musanganiswa mugasi rinotakura uye kuisa makristasi pane substrate kuburikidza nekuita kwemakemikari.