Metal-Organic Chemical Vapor Deposition (MOCVD) idanho rakakosha muindasitiri yesemiconductor, uko mafirimu matete emhando yepamusoro anoiswa mumasubstrates. Chinhu chakakosha cheMOCVD maitiro ndeye susceptor, chinhu chakakosha chinoita basa rakakosha mukuona kufanana uye kunaka kwemafirimu anogadzirwa.
Chii chinonzi Susceptor? A susceptor chinhu chakasarudzika chinoshandiswa muMOCVD maitiro kutsigira uye kupisa iyo substrate inoisirwa mafirimu matete. Inoshanda akawanda mabasa, anosanganisira kutora simba remagetsi emagetsi, kuishandura kuti ive kupisa, uye zvakafanana kugovera kupisa uku pane substrate. Uku kupisa kweyunifomu kwakakosha pakukura kwemafirimu ane homogeneous ane ukobvu chaihwo uye kuumbwa.
Mhando dzeSusceptors:
1. Graphite Susceptors: Inowanzovharwa nevhavha yekudzivirira, yakadai sesilicon carbide (SiC), magirafu susceptors anozivikanwa nokuda kwepamusoro-soro yekupisa uye kugadzikana. TheSiC coatinginopa nzvimbo yakaoma, inodzivirira inopikisa kuonda uye kuparara pakupisa kwepamusoro.
2. Silicon Carbide (SiC) Susceptors: Izvi zvinogadzirwa zvachose kubva kuSiC, zvinopa yakanakisa kugadzikana kwekupisa uye kuramba kupfeka uye kubvarura.SiC susceptorsinonyanya kukodzera maitiro ekupisa kwepamusoro uye nzvimbo dzinoparadza.
SeiSusceptorsShanda muMOCVD:
Muchiitiko cheMOCVD, maprecursors anounzwa mukamuri reactor, kwaanoora uye anoita kuti aite firimu rakatetepa pane substrate. Iyo susceptor inoita basa rakakosha nekuona kuti iyo substrate inopisa zvakafanana, izvo zvakakosha kuti uwane inowirirana firimu zvimiro munzvimbo yese yepasi. Iyo susceptor dhizaini uye dhizaini yakanyatso kusarudzwa kuti ienderane nezvinodiwa zveiyo deposition process, senge tembiricha yemhando uye kuenderana kwemakemikari.
Zvakanakira KushandisaHigh-Quality Susceptors:
• Hunhu hweFirimu Hunovandudzwa: Nekupa kugovera kupisa kwakafanana, ma susceptors anobatsira mukuwana mafirimu ane ukobvu hunoenderana uye kuumbwa, izvo zvakakosha pakuita kwesemiconductor zvishandiso.
• Kuwedzera Kubudirira Kwekuita: Zvigadzirwa zvepamusoro-soro zvinovandudza kushanda kwese kweMOCVD kuburikidza nekuderedza mukana wekukanganisa uye kuwedzera zvibereko zvemafirimu anoshandiswa.
• Kureba kwenguva refu uye Kuvimbika: Masusceptors akagadzirwa kubva kune akasimba zvinhu seSiC anovimbisa kuvimbika kwenguva refu uye kuderedzwa kwemitengo yekugadzirisa.
Mhedziso: Iyo susceptor chinhu chakakosha muMOCVD maitiro, ichikanganisa zvakananga kunaka uye kushanda kweiyo yakaonda firimu deposition. Nekusarudza iyo chaiyo susceptor zvinhu uye dhizaini, vagadziri vesemiconductor vanogona kukwidziridza maitiro avo, zvichikonzera kuita kurinani kwechishandiso uye kuderera kwemitengo yekugadzira. Sezvo kudiwa kwezvishandiso zvemagetsi zvemhando yepamusoro kuri kuramba kuchikura, kukosha kwemhando yepamusoro MOCVD susc
Nguva yekutumira: Aug-12-2024