TheMOCVDnzira ndeimwe yemaitiro akanyanya kugadzikana ari kushandiswa muindasitiri yekukura emhando yepamusoro crystalline matete mafirimu, senge single phase InGaN epilayers, III-N zvinhu, uye semiconductor mafirimu ane akawanda quantum zvakanaka zvimiro, uye ane kukosha kukuru kugadzirwa kwesemiconductor uye optoelectronic zvishandiso.
TheSiC yekuputira MOCVD suceptorndeye yakasarudzika wafer inobata yakavharwa nesilicon carbide (SiC) yeepitaxial kukura musimbi organic makemikari vapor deposition (MOCVD) maitiro.
Iyo SiC coating ine yakanakisa makemikari kuramba uye kugadzikana kwekupisa, zvichiita kuti ive sarudzo yakanaka kune MOCVD susceptors anoshandiswa mukuda epitaxial kukura maitiro.
Chinhu chakakosha cheMOCVD maitiro ndeye susceptor, inova chinhu chakakosha kuti ive nechokwadi chekufanana uye kunaka kwemafirimu matete anogadzirwa.
Chii chinonzi susceptor? Iyo susceptor chinhu chakasarudzika chinoshandiswa muMOCVD maitiro kutsigira uye kupisa iyo substrate iyo yakaonda firimu inoiswa. Iyo ine akawanda mabasa, anosanganisira kunwisa magetsi emagetsi, kuishandura kuita kupisa, uye kugovera kupisa zvakaenzana pane substrate. Uku kupisa kweyunifomu kwakakosha pakukura kwemayunifomu akaonda mafirimu ane ukobvu chaihwo uye kuumbwa.
Mhando dze susceptors:
1. Graphite susceptors: Graphite susceptors inowanzoputirwa nerunyoro runodzivirira senge.silicon carbide (SiC), iyo inozivikanwa nokuda kwekukwirira kwayo kwekushisa uye kugadzikana. TheSiC coatinginopa nzvimbo yakaoma, inodzivirira inopikisa kuonda uye kuparara pakupisa kwepamusoro.
2. Silicon carbide (SiC) susceptors: Aya ma susceptors anogadzirwa zvachose neSiC uye ane yakanakisa thermal kugadzikana uye kupfeka kusagadzikana. SiC susceptors inonyanya kukodzera kune yakakwirira-yekupisa maitiro uye inoparadza nharaunda.
Mashandisiro anoita susceptors muMOCVD:
Mune MOCVD maitiro, precursors anounzwa mukamuri yekupindura kwaanoora uye anoita kuti agadzire firimu rakatetepa pane substrate. Iyo susceptor inoita basa rakakosha nekuona kuti iyo substrate inopisa zvakaenzana, izvo zvakakosha kuti uwane inowirirana firimu zvimiro munzvimbo yese ye substrate. Izvo zvinhu uye dhizaini ye susceptor yakanyatso kusarudzwa kuti isangane nezvinodiwa chaizvo zvekugadzirisa maitiro, senge tembiricha yemhando uye kuenderana kwemakemikari.
Zvakanakira kushandisa emhando yepamusoro susceptors:
• Kuvandudzwa kwemafirimu emhando: Nekupa yunifomu yekugovera kupisa, iyo susceptor inobatsira kuwana mafirimu nehupamhi hunoenderana uye kuumbwa, izvo zvakakosha pakushanda kwezvigadzirwa zve semiconductor.
• Kuvandudzwa kwemaitiro ekugadzirisa: Masikirwo emhando yepamusoro anowedzera kushanda kwese kweMOCVD kuburikidza nekuderedza mukana wekukanganisa uye kuwedzera zvibereko zvemafirimu anoshandiswa.
• Upenyu uye kuvimbika: Zvisungo zvakagadzirwa nezvinhu zvakasimba zvakadai seSiC zvinovimbisa kuvimbika kwenguva refu uye kuderedza mari yekugadzirisa.
Iyo susceptor chinhu chakakosha muMOCVD maitiro uye inokanganisa zvakananga kunaka uye kushanda kweiyo yakaonda firimu deposition. Kuti uwane rumwe ruzivo nezve hukuru huripo, MOCVD susceptors uye mitengo, ndapota usazeza kutibata nesu. Mainjiniya edu achafara kukupa zano pazvinhu zvakakodzera uye kupindura mibvunzo yako yese.
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Nguva yekutumira: Aug-12-2024