TheQuartz Glass Pedestalkubva kuSemicera yakagadzirwa zvine hungwaru kune yakakwirira-inoshanda mafomu mukugadzira semiconductor uye ane hukama maindasitiri. Yakagadzirwa kubvahigh kuchena quartz, iyi pedestal inovimbisa kugadzikana kwekupisa kwekupisa uye kupikisa kwakanyanya kumakemikari, zvichiita kuti ive yakanaka kune inoda nharaunda.
Yedu quartz pedestal inopa rutsigiro rwakavimbika panguva dzakakomba maitiro seLPCVD (Low-Pressure Chemical Vapor Deposition) uye kupararira.waferprocess. Nemhando yayo yepamusoro, iyo yakasanganiswa silica girazi inoshandiswa mukuvaka kwezvigadziko zvedu inoderedza njodzi yekusvibiswa, kuve nechokwadi chekuvimbika kwezvigadzirwa zvako.
PaSemicera, takazvipira kupa zvigadzirwa zvemhando yepamusoro zvinosangana neyakaomarara indasitiri zviyero. YeduQuartz Glass Pedestalyakagadzirirwa kutsigira maitiro akasiyana-siyana zvinobudirira uku ichichengetedza kusimba uye kuvimbika. Ingave yekutsvagisa, kusimudzira, kana kugadzira, iyi pedestal chinhu chakakosha kuti uwane mhedzisiro yepamusoro mumabasa ako.
isu tinonzwisisa kukosha kwezvinhu zvemhando yepamusoro mumunda we semiconductor. Yedu yakasanganiswa quartz girazi zvikamu hazvisi kungogara chete asiwo zvine mutengo wemakwikwi. Iyo yakasanganiswa quartz inoshandiswa mumakumbo edu inopa kuita kwakanakisa, zvichiita kuti ive sarudzo inosarudzika kune nyanzvi dzinotsvaga kuvimbika pasina kukanganisa pamhando.
Zvakanakira zveFused Quartz Material
1.High Temperature Resistance
Iyo Fused Quartz Pedestal inodada neyakapfava inosvika 1730°C, ichiibvumira kushingirira kushandiswa kwenguva refu patembiricha kubva pa1100°C kusvika 1250°C. Uyezve, inogona kutsungirira kuratidzwa kwenguva pfupi kune tembiricha yakakwira kusvika 1450 ° C.
2.Corrosion Resistance
Iyo Fused Quartz Pedestal ikemikari inert kune akawanda acids, kunze kwehydrofluoric acid. Asidhi yayo inopokana inopfuura iya yekeramic ka30 uye simbi isina tsvina ka150. Pakupisa kwakanyanya, hapana chimwe chinhu chinogona kuenderana nekugadzikana kwekemikari ye quartz yakasanganiswa, zvichiita kuti ive sarudzo yakanaka kune yakaoma makemikari nharaunda.
3. Thermal Kugadzikana
Imwe yeakamira maficha eFused Quartz Pedestal ndiyo idiki yekupisa yekuwedzera coefficient. Ichi chivakwa chinochibvumira kutsungirira zvakanyanya tembiricha shanduko pasina kuputika. Semuenzaniso, inogona kukurumidza kupisa kusvika ku1100 ° C uye yobva yanyudzwa mumvura pane tembiricha yekamuri pasina kuchengetedza kukuvadzwa - hunhu hunokosha hwekugadzirisa-kushushikana kwekugadzira maitiro.
