RTP CVD SiC Mhete

RTP CVD SiC Ring Inoratidzwa Mufananidzo

Tsanangudzo Pfupi:

RTP CVD SiC mhete dzinonyanya kuumbwa nesilicon carbide (SiC), iyo makemikari kuumbwa uye kristaro chimiro zvinopa kuita kwakanakisa. Silicon carbide chinhu checeramic chine yakakwira kunyungudika, kuomarara kwakanyanya uye yakanakisa corrosion kuramba. Iyo inoratidzira yakanaka yekupisa conductivity uye kugadzikana kwemakemikari pakupisa kwakanyanya, uye ine yakanakisa mechanic simba uye kupfeka kuramba.

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Sei Silicon Carbide Etching Ring?

RTPCVD SiC zvindorianoshandiswa zvakanyanya mumaindasitiri nesainzi minda mukupisa kwakanyanya uye nharaunda dzinoparadza. Inoita basa rakakosha mukugadzira semiconductor, optoelectronics, chaiyo muchina uye indasitiri yemakemikari. Zvakananga zvikumbiro zvinosanganisira:

1. Semiconductor kugadzira:RTP CVD SiC mheteinogona kushandiswa kupisa uye kutonhora kwemidziyo yesemiconductor, ichipa kudzora tembiricha yakagadzikana uye kuve nechokwadi chechokwadi uye kuenderana kwemaitiro.

2. Optoelectronics: Nekuda kweiyo yakanakisa yekupisa conductivity uye yakakwirira tembiricha kuramba, RTPCVD SiC zvindoriinogona kushandiswa sekutsigira uye kupisa kupisa zvinhu zve lasers, fiber optic yekutaurirana michina uye optical components.

3. Michina yakanyatsogadzirwa: RTP CVD SiC zvindori zvinogona kushandiswa kune zvakarurama zviridzwa uye midziyo mukupisa kwepamusoro uye nzvimbo dzinopisa, dzakadai semavira ekupisa, zvivharo zvevacuum uye makemikari reactors.

4. Indasitiri yemakemikari: Pamusana pekudzivirira kwayo uye kugadzikana kwemakemikari, RTP CVD SiC zvindori zvinogona kushandiswa mumidziyo, mapaipi uye zvinogadzirisa mumakemikari maitiro uye maitiro ekugadzirisa.

Epi System

RTP System

CVD System

Kuita kwechigadzirwa:

1. Sangana nemaitiro ari pasi pe28nm

2. Super corrosion resistance

3. Super yakachena kuita

4. Kuoma kukuru

5. High density

6. Kudzivirira kwekushisa kwepamusoro

7. Pfeka kuramba

Product application:

Silicon carbide zvinhu zvine hunhu hwekuomarara kwakanyanya, kupfeka kuramba, corrosion kuramba uye kugadzikana kwekushisa kwakanyanya. Zvigadzirwa zvine hunyanzvi hwakakwana kuita zvinoshandiswa zvakanyanya mukuoma etching uye TF/Diffusion maitiro.