Semicera Semicera inopa yakasarudzika tantalum carbide (TaC) machira eakasiyana zvikamu uye vatakuri.Semicera Semicera inotungamira coating process inogonesa tantalum carbide (TaC) machira kuti awane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kushivirira kwemakemikari, kuvandudza kunaka kwechigadzirwa cheSIC/GAN makristasi uye EPI layer.Graphite yakavharwa neTaC suceptor), uye kuwedzera hupenyu hwezvinhu zvakakosha reactor. Iko kushandiswa kwetantalum carbide TaC coating ndeyekugadzirisa dambudziko rekumucheto uye kuvandudza kunaka kwekristaro kukura, uye Semicera Semicera yakabudirira yakagadzirisa tantalum carbide coating tekinoroji (CVD), ichisvika padanho repasi rose.
Mushure memakore ebudiriro, Semicera yakakunda tekinoroji yeCVD TaCpamwe nekuedza kwakabatana kwebazi reR&D. Kukanganisa kuri nyore kuitika mukukura kweSiC wafers, asi mushure mekushandisaTaC, musiyano unokosha. Pazasi pane kuenzanisa kwemawafer ane uye asina TaC, pamwe neSimicera 'zvikamu zvekukura kwekristaro imwe chete.
ne uye pasina TaC
Mushure mekushandisa TaC (kurudyi)
Uyezve, Semicera'sTaC-yakavharwa zvigadzirwakuratidza hupenyu hurefu hwesevhisi uye hukuru hwepamusoro-tembiricha kuramba zvichienzaniswa neSiC coatings.Laboratory kuyerwa kwakaratidza kuti yeduTaC coatingsinogona kugara ichiita patembiricha inosvika 2300 degrees Celsius kwenguva yakareba. Pazasi pane mimwe mienzaniso yemienzaniso yedu:
