Iyo Solid SiC Focus Mhete kubva kuSemicera chinhu chekucheka-kumucheto chakagadzirirwa kusangana nezvinodiwa zvepamberi semiconductor kugadzira. Yakagadzirwa kubva kumusoro-kuchenaSilicon Carbide (SiC), iyi mhete yekutarisa yakanakira huwandu hwakawanda hwekushandisa muindasitiri yesemiconductor, kunyanya muCVD SiC maitiro, plasma etching, uyeICPRIE (Inductively Coupled Plasma Reactive Ion Etching). Inozivikanwa nekusarudzika kwayo kupfeka kuramba, kugadzikana kwakanyanya kwekushisa, uye kuchena, inovimbisa kushanda kwenguva refu munzvimbo dzakanyanya-kushushikana.
Mune semiconductorwaferkugadzirisa, Solid SiC Focus Rings yakakosha mukuchengetedza chaiyo etching panguva yakaoma etching uye wafer etching application. Iyo SiC yekutarisa mhete inobatsira mukutarisa iyo plasma panguva dzemaitiro akadai seplasma etching muchina mashandiro, zvichiita kuti ive yakakosha pakucheka kwesilicon wafers. Iyo yakasimba SiC zvinhu zvinopa kusingaenzaniswi kuramba kukukurwa, kuve nechokwadi chehupenyu hurefu hwemidziyo yako uye kuderedza nguva yekudzikira, izvo zvakakosha pakuchengetedza yakakwira yekubuda mukugadzira semiconductor.
Iyo Solid SiC Yekutarisa Mhete kubva kuSemicera inogadzirwa kuti imirire tembiricha yakanyanyisa uye makemikari ane hukasha anowanzo sangana muindasitiri yesemiconductor. Yakanyatsogadzirirwa kushandiswa mumabasa epamusoro-soro akadai seCVD SiC coatings, uko kuchena uye kusimba kunonyanya kukosha. Nekupokana kwakanyanya kwekuvhundutsa kwemafuta, chigadzirwa ichi chinovimbisa kuenderana uye kugadzikana kushanda pasi pemamiriro akaomarara, kusanganisira kuratidzwa kune tembiricha yakanyanya panguva.waferetching process.
Mune semiconductor maapplication, uko kurongeka uye kuvimbika kwakakosha, iyo Solid SiC Focus Mhete inoita basa rakakosha mukusimudzira kugona kwese kwemaitiro etching. Yayo yakasimba, yakakwirira-inoshanda dhizaini inoita kuti ive sarudzo yakakwana kune maindasitiri anoda yakakwirira-kuchena zvikamu zvinoita pasi pemamiriro akanyanya. Kana kushandiswa muCVD SiC mhetemashandisirwo kana sechikamu cheplasma etching process, Semicera's Solid SiC Focus Mhete inobatsira kukwirisa mashandiro emidziyo yako, ichipa hupenyu hurefu uye kuvimbika kudiwa kwako kwekugadzira maitiro.
Zvinokosha:
• Kunyanya kupfeka kusagadzikana uye kugadzikana kwepamusoro kwekushisa
• High-kuchena Solid SiC zvinhu zvekuwedzera hupenyu
• Yakanakira plasma etching, ICP RIE, uye yakaoma etching application
• Yakakwana yewafer etching, kunyanya muCVD SiC maitiro
• Kuita kwakavimbika munzvimbo dzakanyanyisa uye kutonhora kwakanyanya
• Inova nechokwadi chechokwadi uye kushanda zvakanaka mukunamira kwesilicon wafers
Applications:
• CVD SiC maitiro mukugadzira semiconductor
• Plasma etching uye ICP RIE masisitimu
• Dry etching uye wafer etching maitiro
• Etching uye kuisa muplasma etching machines
• Precision zvikamu zvewafer zvindori uye CVD SiC mhete