The SemiceraSiC Cantilever Wafer Paddleyakagadzirirwa kusangana nezvinodiwa zvemazuva ano semiconductor kugadzira. Izviwafer paddleinopa yakanakisa mechanicha simba uye kupisa kwekudzivirira, izvo zvakakosha pakubata mawaferi munzvimbo dzepamusoro-tembiricha.
Iyo SiC cantilever dhizaini inogonesa chaiyo wafer kuiswa, kuderedza njodzi yekukuvara panguva yekubata. Yayo yakanyanya kupisa conductivity inovimbisa kuti wafer inoramba yakagadzikana kunyangwe iri pasi pemamiriro akanyanya, izvo zvakakosha pakuchengetedza kugadzirwa kwakanaka.
Pamusoro pezvakanakira zvimiro, Semicera'sSiC Cantilever Wafer Paddleinopawo zvakanakira uremu uye kusimba. Kuvakwa kwakareruka kunoita kuti zvive nyore kubata uye kusanganisa mumasisitimu aripo, nepo yakakwirira-density SiC zvinhu inogonesa kugara kwenguva refu pasi pemamiriro anodiwa.
| Zvenyama zvimiro zveRecrystallized Silicon Carbide | |
| Property | Typical Value |
| Tembiricha yekushanda (°C) | 1600°C (neokisijeni), 1700°C (inoderedza nharaunda) |
| SiC content | > 99.96% |
| Free Si content | <0.1% |
| Bulk density | 2.60-2.70 g/cm3 |
| Inooneka porosity | <16% |
| Kumanikidza simba | > 600 MPa |
| Kutonhora kukotama simba | 80-90 MPa (20°C) |
| Simba rekukotama rinopisa | 90-100 MPa (1400°C) |
| Kuwedzera kupisa @1500°C | 4.70 10-6/°C |
| Thermal conductivity @1200°C | 23 W/m•K |
| Elastic modulus | 240 GPA |
| Thermal shock resistance | Kunyanya kunaka |
