SemiceraSilicon Carbide Ceramic Coatingndeyepamusoro-inoshanda inodzivirira coating yakagadzirwa zvakanyanya kuoma uye kusapfeka-resistant silicon carbide (SiC) zvinhu. Iyo yekupfekedza inowanzoiswa pamusoro peiyo substrate neCVD kana PVD maitiro nesilicon carbide zvimedu, kupa yakanakisa makemikari corrosion kuramba uye yakakwirira tembiricha kugadzikana. Naizvozvo, Silicon Carbide Ceramic Coating inoshandiswa zvakanyanya muzvikamu zvakakosha zvemichina yekugadzira semiconductor.
Mukugadzira semiconductor,SiC coatinginogona kumira zvakanyanya kupisa kusvika ku1600 ° C, saka Silicon Carbide Ceramic Coating inowanzoshandiswa sechidziviriro chemidziyo kana maturusi ekudzivirira kukuvadzwa mukupisa kwepamusoro kana nharaunda dzinoparadza.
Panguva imwe,silicon carbide ceramic coatinginogona kurwisa kukukurwa kweasidhi, alkali, okisidhi uye mamwe makemikari reagents, uye ine yakakwirira corrosion resistance kune akasiyana emakemikari zvinhu. Naizvozvo, chigadzirwa ichi chakakodzera kune akasiyana corrosive nharaunda mune semiconductor indasitiri.
Uyezve, zvichienzaniswa nezvimwe zvinhu zveceramic, SiC ine yakakwirira yekupisa conductivity uye inogona kunyatso kuitisa kupisa. Ichi chimiro chinotarisa kuti mune semiconductor maitiro anoda chaiyo tembiricha yekudzora, iyo yakanyanya kupisa conductivity yeSilicon Carbide Ceramic Coatinginobatsira kuparadzira kupisa zvakaenzana, kudzivirira kupisa kwenzvimbo, uye kuona kuti mudziyo unoshanda patembiricha yakakwana.
| Basic zvemuviri zvimiro zveCVD sic coating | |
| Property | Typical Value |
| Crystal Structure | FCC β phase polycrystalline, kunyanya (111) yakatarisana |
| Density | 3.21 g/cm³ |
| Kuoma | 2500 Vickers kuoma (500g mutoro) |
| Zviyo SiZe | 2~10μm |
| Chemical Purity | 99.99995% |
| Heat Capacity | 640 J·kg-1·K-1 |
| Sublimation Temperature | 2700 ℃ |
| Flexural Strength | 415 MPa RT 4-poindi |
| Young's Modulus | 430 Gpa 4pt bend, 1300 ℃ |
| Thermal Conductivity | 300Wm-1·K-1 |
| Kuwedzera kweThermal (CTE) | 4.5 × 10-6K-1 |
