Product Overview
TheSilicon-Impregnated Silicon Carbide (SiC) Paddle uye Wafer Carrierinogadzirwa kuti isangane nezvinodiwa zvinodiwa zve semiconductor thermal processing application. Yakagadzirwa kubva yakakwira-kuchena SiC uye yakakwidziridzwa kuburikidza nesilicon impregnation, chigadzirwa ichi chinopa yakasarudzika musanganiswa wepamusoro-tembiricha kuita, yakanakisa yekupisa conductivity, corrosion kuramba, uye yakasarudzika simba remuchina.
Nekubatanidza sayenzi yemhando yepamusoro nekugadzirwa kwayo, mhinduro iyi inovimbisa kuita kwepamusoro, kuvimbika, uye kusimba kwevagadziri vesemiconductor.
Key Features
1.Kusarudzika Yepamusoro-Tembiricha Resistance
Iine nzvimbo yekunyungudika inodarika 2700 ° C, SiC zvinhu zvakatsiga pasi pekupisa kwakanyanya. Silicon impregnation inowedzera kuwedzera kugadzikana kwavo kwekupisa, zvichivabvumira kuti vakwanise kutsungirira kuratidzwa kwenguva refu kune tembiricha yakakwira pasina kusimba kwechimiro kana kuparara kwekuita.
2.Superior Thermal Conductivity
Iyo yakasarudzika yekupisa conductivity yesilicon-impregnated SiC inovimbisa yunifomu yekupisa kugovera, kuderedza kupisa kushushikana panguva dzakakomba dzekugadzirisa matanho. Ichi chivakwa chinowedzera hupenyu hwemidziyo uye inoderedza kugadzirwa kudzika, zvichiita kuti ive yakakodzera kune yakanyanya-tembiricha yekupisa.
3.Oxidation uye Corrosion Resistance
Iyo yakasimba silicon oxide layer inoumba yakasikwa pamusoro, ichipa kwakatanhamara kuramba oxidation uye corrosion. Izvi zvinovimbisa kuvimbika kwenguva refu munzvimbo dzakaoma dzekushanda, kudzivirira zvose zvinhu uye zvikamu zvakapoteredza.
4.Yakakwira Mechanical Simba uye Wear Resistance
Silicon-impregnated SiC inoratidzira yakanakisa compression simba uye kupfeka kuramba, kuchengetedza kwayo kutendeseka kwechimiro pasi pemutoro wepamusoro, wepamusoro-tembiricha mamiriro. Izvi zvinoderedza njodzi yekukuvadzwa-kwakabatana nekupfeka, kuve nechokwadi chekushanda kwakafanana pamusoro penguva yekushandiswa yakawedzerwa.
Zvinotsanangurwa
| Product Name | SC-RSiC-Si |
| Material | Silicon Impregnation Silicon Carbide Compact (yakanyanya kuchena) |
| Applications | Semiconductor Heat Kurapa Zvikamu, Semiconductor Manufacturing Equipment Zvikamu |
| Delivery form | Muviri wakaumbwa (Sintered body) |
| Composition | Mechanical Property | Mudiki's Modulus (GPa) | Bending Strength (MPa) | ||
| Kuumbwa (vol%) | α-SiC | α-SiC | RT | 370 | 250 |
| 82 | 18 | 800°C | 360 | 220 | |
| Kuwanda kwehuwandu (kg/m³) | 3.02 x 103 | 1200°C | 340 | 220 | |
| Kupisa Kusingapindire°C | 1350 | Poisson's Ratio | 0.18(RT) | ||
| Thermal Property | Thermal Conductivity (W/(m· K)) | Specific Heat Capacity (kJ/(kg·K)) | Coefficient of Thermal Expansion (1/K) | ||
| RT | 220 | 0.7 | RT~700°C | 3.4 x 10-6 | |
| 700°C | 60 | 1.23 | 700~1200°C | 4.3 x10-6 | |
| Zvisina Kuchena zvemukati ((ppm) | |||||||||||||
| Element | Fe | Ni | Na | K | Mg | Ca | Cr | Mn | Zn | Cu | Ti | Va | Ai |
| Content Rate | 3 | <2 | <0.5 | <0.1 | <1 | 5 | 0.3 | <0.1 | <0.1 | <0.1 | <0.3 | <0.3 | 25 |
Applications
▪Semiconductor Thermal Processing:Yakanakira maitiro akadai semakemikari vapor deposition (CVD), epitaxial kukura, uye annealing, uko kwakanyatso kudzora tembiricha uye kusimba kwezvinhu zvakakosha.
▪Wafer Carriers & Paddles:Yakagadzirirwa kuchengetedza uye kutakura mawafer panguva yekupisa kwekushisa kwakanyanya.
▪Zvakanyanya Kushanda Nzvimbo: Inokodzera zvigadziriso zvinoda kuramba kupisa, kuratidzwa kwemakemikari, uye kushushikana kwemagetsi.
Zvakanakira Silicon-Impregnated SiC
Iko kusanganiswa kwepamusoro-kuchena silicon carbide uye yepamusoro silicon impregnation tekinoroji inopa zvisingaenzaniswi mashandiro ekuita:
▪Precision:Inowedzera kurongeka uye kutonga kwe semiconductor kugadzirisa.
▪Kugadzikana:Inomira munzvimbo dzakaoma pasina kukanganisa kushanda.
▪Hurefu hwehupenyu:Inowedzera hupenyu hwesevhisi yemidziyo yekugadzira semiconductor.
▪Kubudirira:Inovandudza chibereko nekuona mhedzisiro yakavimbika uye inowirirana.
Sei Kusarudza Yedu Silicon-Impregnated SiC Solutions?
At Semicera, isu tinonyanya kupa mhinduro dzepamusoro-soro dzakagadzirirwa kune zvinodiwa nevagadziri ve semiconductor. Yedu Silicon-Impregnated Silicon Carbide Paddle uye Wafer Mutakuri anoedzwa kwakasimba uye kuvimbiswa kwemhando yekusangana neindasitiri zviyero. Nekusarudza Semicera, iwe unowana mukana wekucheka-kumucheto zvinhu zvakagadzirirwa kukwidziridza maitiro ako ekugadzira uye kuwedzera kugona kwako kugadzira.
Zvinotaurwa Nezvehunyanzvi
▪Material Maumbirwo:Yakakwirira-kuchena silicon carbide ine silicon impregnation.
▪Operating Temperature Range:Kusvikira ku2700 ° C.
▪ Thermal Conductivity:Yakanyanya kukwirira pakugovera kupisa kwakafanana.
▪Resistance Properties:Oxidation, corrosion, uye kusapfeka.
▪Applications:Inoenderana neakasiyana semiconductor thermal processing system.
Taura nesu
Wakagadzirira kusimudza yako semiconductor kugadzira maitiro? ContactSemiceranhasi kuti udzidze zvakawanda nezve yedu Silicon-Impregnated Silicon Carbide Paddle uye Wafer Carrier.
▪Email: sales01@semi-cera.com/sales05@semi-cera.com
▪Runhare: +86-0574-8650 3783
▪Nzvimbo:No.1958 Jiangnan Road, Ningbo High tech, Zone, Zhejiang Province, 315201, China
