TaC Yakaputirwa Epi Wafer Carrier

Tsanangudzo Pfupi:

Iyo TaC Coated Epi Wafer Carrier naSemicera yakagadzirirwa kuita kwepamusoro mukuita epitaxial. Yayo tantalum carbide coating inopa kusimba kwakasarudzika uye yakakwirira-tembiricha kugadzikana, kuve nechokwadi yakakwana yerutsigiro rwewafer uye nekuwedzera kugadzirwa kwekuita. Semicera's chaiyo kugadzira inovimbisa inowirirana mhando uye kuvimbika mune semiconductor application.

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TaC yakavharwa epitaxial wafer vatakuriinowanzoshandiswa mukugadzirira kwepamusoro-kushanda optoelectronic madivayiri, magetsi emagetsi, sensors uye mamwe minda. Izviepitaxial wafer carrierzvinoreva kuiswa kweTaCfirimu rakatetepa pane substrate panguva yekukura kwekristaro kugadzira wafer ine chaiyo chimiro uye mashandiro einotevera gadziriro yemudziyo.

Chemical vapor deposition (CVD) tekinoroji inowanzo shandiswa kugadziriraTaC yakavharwa epitaxial wafer vatakuri. Nekuita simbi organic precursors uye kabhoni sosi magasi pakupisa kwakanyanya, firimu reTaC rinogona kuiswa pamusoro pekristaro substrate. Iyi firimu inogona kuva nemagetsi emagetsi, optical uye mechanical properties uye inokodzera kugadzirwa kwemhando dzakasiyana-siyana dzepamusoro.

Semicera inopa yakasarudzika tantalum carbide (TaC) machira ezvikamu zvakasiyana uye vatakuri.Semicera inotungamira coating process inogonesa tantalum carbide (TaC) machira kuti awane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kushivirira kwemakemikari, kuvandudza mhando yechigadzirwa cheSIC/GAN makristasi uye EPI layer.Graphite yakavharwa neTaC suceptor), uye kuwedzera hupenyu hwezvinhu zvakakosha reactor. Iko kushandiswa kwetantalum carbide TaC coating ndeyekugadzirisa dambudziko remupendero uye kuvandudza kunaka kwekristaro kukura, uye Semicera yakabudirira kugadzirisa tantalum carbide coating tekinoroji (CVD), ichisvika padanho repasi rose.

Mushure memakore ebudiriro, Semicera yakakunda tekinoroji yeCVD TaCpamwe nekuedza kwakabatana kwebazi reR&D. Kukanganisa kuri nyore kuitika mukukura kweSiC wafers, asi mushure mekushandisaTaC, musiyano unokosha. Pazasi pane kuenzanisa kwemawafer ane uye asina TaC, pamwe neSimicera 'zvikamu zvekukura kwekristaro imwe chete.

Kushanda kwepamusoro tantalum carbide coating_ kunatsiridza kugadzirwa kwemaindasitiri uye kuderedza mari yekugadzirisa Inoratidzwa Mufananidzo

Tac chikamu chekukura imwe kristaro

Antiwear tantalum carbide coating_ Inodzivirira midziyo kubva pakupfeka nekuora Mufananidzo Uripo

Graphite ine TaC yakavharwa mhete

ne uye pasina TaC

Mushure mekushandisa TaC (kurudyi)

Uyezve, Semicera'sTaC-yakavharwa zvigadzirwakuratidza hupenyu hurefu hwesevhisi uye hukuru hwepamusoro-tembiricha kuramba zvichienzaniswa neSiC coatings.Laboratory kuyerwa kwakaratidza kuti yeduTaC coatingsinogona kugara ichiita patembiricha inosvika 2300 degrees Celsius kwenguva yakareba. Pazasi pane mimwe mienzaniso yemienzaniso yedu: