TaC Coted MOCVD Graphite Susceptor

Tsanangudzo Pfupi:

Iyo TaC Yakaputirwa MOCVD Graphite Susceptor neSemicera yakagadzirirwa kusimba kwepamusoro uye kusarudzika kwepamusoro-tembiricha kuramba, zvichiita kuti ive yakakwana kune MOCVD epitaxy application. Iyi susceptor inowedzera kushanda zvakanaka uye mhando muDeep UV LED kugadzirwa. Yakagadzirwa nemazvo, Semicera inova nechokwadi chepamusoro-notch kuita uye kuvimbika mune chero chigadzirwa.

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TaC coatingchinhu chakakosha chekuputira, icho chinowanzo gadzirirwa pachigadziko chegraphite nesimbi organic chemical vapor deposition (MOCVD) tekinoroji. Uku kupfekedza kune zvinhu zvakanakisa, senge kuomarara kwepamusoro, kupfeka kwakanakisa kuramba, kupisa kwekushisa kwakanyanya uye kugadzikana kwemakemikari, uye inokodzera akasiyana-siyana anodiwa einjiniya maapplication.

MOCVD tekinoroji inowanzoshandiswa yakatetepa firimu kukura tekinoroji inoisa iyo inodiwa yefirimu firimu pane substrate pamusoro nekuita simbi organic precursors ine reactive magasi pakupisa kwakanyanya. PakugadziriraTaC coating, kusarudza yakakodzera simbi organic precursors uye kabhoni masosi, kudzora maitiro ekuita uye deposition paramita, yunifomu uye dense TaC firimu inogona kuiswa pane graphite base.

Semicera inopa yakasarudzika tantalum carbide (TaC) machira ezvakasiyana zvikamu uye vatakuri.Semicera inotungamira coating process inogonesa tantalum carbide (TaC) machira kuti awane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kushivirira kwemakemikari, kuvandudza mhando yechigadzirwa cheSIC/GAN makristasi uye EPI layer.Graphite yakavharwa neTaC suceptor), uye kuwedzera hupenyu hwezvinhu zvakakosha reactor. Iko kushandiswa kwetantalum carbide TaC coating ndeyekugadzirisa dambudziko remupendero uye kuvandudza kunaka kwekristaro kukura, uye Semicera yakabudirira kugadzirisa tantalum carbide coating tekinoroji (CVD), ichisvika padanho repasi rose.

Mushure memakore ebudiriro, Semicera yakakunda tekinoroji yeCVD TaCpamwe nekuedza kwakabatana kwebazi reR&D. Kukanganisa kuri nyore kuitika mukukura kweSiC wafers, asi mushure mekushandisaTaC, musiyano unokosha. Pazasi pane kuenzanisa kwemawafer ane uye asina TaC, pamwe neSimicera 'zvikamu zvekukura kwekristaro imwe chete.

Kushanda kwepamusoro tantalum carbide coating_ kunatsiridza kugadzirwa kwemaindasitiri uye kuderedza mari yekugadzirisa Inoratidzwa Mufananidzo

Tac chikamu chekukura imwe kristaro

Antiwear tantalum carbide coating_ Inodzivirira midziyo kubva pakupfeka nekuora Mufananidzo Uripo

Graphite ine TaC yakavharwa mhete

ne uye pasina TaC

Mushure mekushandisa TaC (kurudyi)

Uyezve, Semicera'sTaC-yakavharwa zvigadzirwakuratidza hupenyu hurefu hwesevhisi uye hukuru hwepamusoro-tembiricha kuramba zvichienzaniswa neSiC coatings.Laboratory kuyerwa kwakaratidza kuti yeduTaC coatingsinogona kugara ichiita patembiricha inosvika 2300 degrees Celsius kwenguva yakareba. Pazasi pane mimwe mienzaniso yemienzaniso yedu: