Tantalum Carbid Coating Half-moon

Tsanangudzo Pfupi:

Nekuuya kwe8-inch silicon carbide (SiC) mawafers, zvinodiwa kune akasiyana semiconductor maitiro zvave kuwedzera kuomarara, kunyanya kune epitaxy maitiro apo tembiricha inogona kudarika 2000 degrees Celsius. Traditional susceptor materials, senge graphite yakavharwa nesilicon carbide, inowanzoita sublimate pane idzi tembiricha dzakakwirira, zvichikanganisa epitaxy process. Zvakadaro, CVD tantalum carbide (TaC) inogadzirisa nyaya iyi zvine mutsindo, iine tembiricha inosvika 2300 degrees Celsius uye ichipa hupenyu hwesevhisi hurefu. Bata Semicera's Tantalum Carbid Coating Half-moonkuongorora zvakawanda nezve yedu yepamusoro mhinduro.

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Semicera inopa yakasarudzika tantalum carbide (TaC) machira ezvakasiyana zvikamu uye vatakuri.Semicera inotungamira coating process inogonesa tantalum carbide (TaC) machira kuti awane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kushivirira kwemakemikari, kuvandudza mhando yechigadzirwa cheSIC/GAN makristasi uye EPI layer.Graphite yakavharwa neTaC suceptor), uye kuwedzera hupenyu hwezvinhu zvakakosha reactor. Iko kushandiswa kwetantalum carbide TaC coating ndeyekugadzirisa dambudziko remupendero uye kuvandudza kunaka kwekristaro kukura, uye Semicera yakabudirira kugadzirisa tantalum carbide coating tekinoroji (CVD), ichisvika padanho repasi rose.

Mushure memakore ebudiriro, Semicera yakakunda tekinoroji yeCVD TaCpamwe nekuedza kwakabatana kwebazi reR&D. Kukanganisa kuri nyore kuitika mukukura kweSiC wafers, asi mushure mekushandisaTaC, musiyano unokosha. Pazasi pane kuenzanisa kwemawafer ane uye asina TaC, pamwe neSimicera 'zvikamu zvekukura kwekristaro imwe chete.

Kushanda kwepamusoro tantalum carbide coating_ kunatsiridza kugadzirwa kwemaindasitiri uye kuderedza mari yekugadzirisa Inoratidzwa Mufananidzo

Tac chikamu chekukura imwe kristaro

Antiwear tantalum carbide coating_ Inodzivirira midziyo kubva pakupfeka nekuora Mufananidzo Uripo

Graphite ine TaC yakavharwa mhete

ne uye pasina TaC

Mushure mekushandisa TaC (kurudyi)

Uyezve, Semicera'sTaC-yakavharwa zvigadzirwakuratidza hupenyu hurefu hwesevhisi uye hukuru hwepamusoro-tembiricha kuramba zvichienzaniswa neSiC coatings.Laboratory kuyerwa kwakaratidza kuti yeduTaC coatingsinogona kugara ichiita patembiricha inosvika 2300 degrees Celsius kwenguva yakareba. Pazasi pane mimwe mienzaniso yemienzaniso yedu: