Semicera inopa yakasarudzika tantalum carbide (TaC) machira ezvakasiyana zvikamu uye vatakuri.Semicera inotungamira coating process inogonesa tantalum carbide (TaC) machira kuti awane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kushivirira kwemakemikari, kuvandudza mhando yechigadzirwa cheSIC/GAN makristasi uye EPI layer.Graphite yakavharwa neTaC suceptor), uye kuwedzera hupenyu hwezvinhu zvakakosha reactor. Iko kushandiswa kwetantalum carbide TaC coating ndeyekugadzirisa dambudziko remupendero uye kuvandudza kunaka kwekristaro kukura, uye Semicera yakabudirira kugadzirisa tantalum carbide coating tekinoroji (CVD), ichisvika padanho repasi rose.
Tantalum carbide coated wafer carriers inoshandiswa zvakanyanya mukugadzira wafer uye kubata maitiro mune semiconductor yekugadzira maitiro. Ivo vanopa yakatsiga rutsigiro uye dziviriro kuti ive nechokwadi chekuchengetedza, chokwadi uye kuenderana kwewafers panguva yekugadzira maitiro. Tantalum carbide coatings inogona kuwedzera hupenyu hwesevhisi yemutakuri, kuderedza mitengo, uye kugadzirisa mhando uye kuvimbika kwezvigadzirwa zvesemiconductor.
Tsanangudzo ye tantalum carbide coated wafer carrier ndeiyi inotevera:
1. Kusarudzwa kwezvinhu: Tantalum carbide chinhu chine basa rakanakisisa, kuoma kwakakwirira, nzvimbo yakanyanyisa yakanyunguduka, kusagadzikana kwekuora uye yakanakisa mechanical properties, saka inoshandiswa zvakanyanya mukugadzira semiconductor.
2. Surface coating: Tantalum carbide coating inoshandiswa pamusoro pemutakuri wewafer kuburikidza neanokosha ekuputira maitiro kuumba yunifomu uye dense tantalum carbide coating. Uku kupfekedza kunogona kupa kumwe kudzivirira uye kupfeka kuramba, uku uine yakanaka yekupisa conductivity.
3. Flatness uye nemazvo: Tantalum carbide coated wafer carrier ine yakakwira dhigirii yeflatness uye nemazvo, kuve nechokwadi kugadzikana uye kurongeka kwezvimedu panguva yekugadzira. Iyo flatness uye kupera kweiyo inotakura nzvimbo yakakosha kuve nechokwadi chemhando uye kuita kwewafer.
4. Kugadzikana kwekushisa: Tantalum carbide coated wafer carriers inogona kuchengetedza kugadzikana munzvimbo dzekushisa kwepamusoro pasina deformation kana kusunungura, kuve nechokwadi chekugadzikana uye kuwirirana kwezvimedu mukupisa kwakanyanya.
5. Corrosion resistance: Tantalum carbide coatings ine yakanakisa corrosion resistance, inogona kuramba kukukurwa kwemakemikari nesolvents, uye kudzivirira mutakuri kubva kumvura uye gasi corrosion.
ne uye pasina TaC
Mushure mekushandisa TaC (kurudyi)
Uyezve, Semicera'sTaC-yakavharwa zvigadzirwakuratidza hupenyu hurefu hwesevhisi uye hukuru hwepamusoro-tembiricha kuramba zvichienzaniswa neSiC coatings.Laboratory kuyerwa kwakaratidza kuti yeduTaC coatingsinogona kugara ichiita patembiricha inosvika 2300 degrees Celsius kwenguva yakareba. Pazasi pane mimwe mienzaniso yemienzaniso yedu:
