Tantalum carbide yakavharwa graphite sheetchinhu che graphite chine chidimbu chitete chetantalum carbidepamusoro pe substrate. Iyo yakatetepa yetantalum carbide inowanzoumbwa pamusoro peiyo graphite substrate nehunyanzvi hwakadai semuviri mhute deposition (PVD) kana kemikari vapor deposition (CVD). Uku kupfekedza kune zvakanakisa zvimiro senge kuomarara kwepamusoro, zvakanakisa kupfeka kuramba, corrosion resistance uye kugadzikana kwekushisa kwepamusoro.
Semicera inopa yakasarudzika tantalum carbide (TaC) machira ezvakasiyana zvikamu uye vatakuri.Semicera inotungamira coating process inogonesa tantalum carbide (TaC) machira kuti awane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kushivirira kwemakemikari, kuvandudza mhando yechigadzirwa cheSIC/GAN makristasi uye EPI layer.Graphite yakavharwa neTaC suceptor), uye kuwedzera hupenyu hwezvinhu zvakakosha reactor. Iko kushandiswa kwetantalum carbide TaC coating ndeyekugadzirisa dambudziko remupendero uye kuvandudza kunaka kwekristaro kukura, uye Semicera yakabudirira kugadzirisa tantalum carbide coating tekinoroji (CVD), ichisvika padanho repasi rose.
Mushure memakore ebudiriro, Semicera yakakunda tekinoroji yeCVD TaCpamwe nekuedza kwakabatana kwebazi reR&D. Kukanganisa kuri nyore kuitika mukukura kweSiC wafers, asi mushure mekushandisaTaC, musiyano unokosha. Pazasi pane kuenzanisa kwemawafer ane uye asina TaC, pamwe neSimicera 'zvikamu zvekukura kwekristaro imwe chete.
Iwo mabhenefiti makuru e tantalum carbide yakavharwa graphite sheet inosanganisira:
1. Kudzivirira kwekushisa kwepamusoro: Tantalum carbide ine nzvimbo yakakwirira yekunyunguduka uye yakanakisa kugadzikana kwekushisa kwepamusoro, zvichiita kuti girafu rakavharidzirwa rive rakakodzera kushandiswa munzvimbo dzakakwirira dzekushisa.
2. Corrosion resistance: Tantalum carbide coating inogona kuramba kukukurwa kwemakemikari akawanda anoparadza zvinhu uye kuwedzera hupenyu hwebasa rezvinhu.
3. Kuomarara kwepamusoro: Kuomarara kwakanyanya kwetantalum carbide yakaonda layer inopa kupfeka kwakanaka kupikisa uye inokodzera zvikumbiro zvinoda kukwirira kupfeka kuramba.
4. Kugadzikana kwekemikari: Tantalum carbide coating ine kugadzikana kwakanakisisa kune kemikari corrosion uye yakakodzera kushandiswa mune dzimwe nhepfenyuro dzinopisa.
ne uye pasina TaC
Mushure mekushandisa TaC (kurudyi)
Uyezve, Semicera'sTaC-yakavharwa zvigadzirwakuratidza hupenyu hurefu hwesevhisi uye hukuru hwepamusoro-tembiricha kuramba zvichienzaniswa neSiC coatings.Laboratory kuyerwa kwakaratidza kuti yeduTaC coatingsinogona kugara ichiita patembiricha inosvika 2300 degrees Celsius kwenguva yakareba. Pazasi pane mimwe mienzaniso yemienzaniso yedu:
