Semicera inopa yakasarudzika tantalum carbide (TaC) machira ezvakasiyana zvikamu uye vatakuri.Semicera inotungamira coating process inogonesa tantalum carbide (TaC) machira kuti awane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kushivirira kwemakemikari, kuvandudza mhando yechigadzirwa cheSIC/GAN makristasi uye EPI layer.Graphite yakavharwa neTaC suceptor), uye kuwedzera hupenyu hwezvinhu zvakakosha reactor. Iko kushandiswa kwetantalum carbide TaC coating ndeyekugadzirisa dambudziko remupendero uye kuvandudza kunaka kwekristaro kukura, uye Semicera yakabudirira kugadzirisa tantalum carbide coating tekinoroji (CVD), ichisvika padanho repasi rose.
Tantalum carbide corrosion-resistant coating rings inoshandiswa zvakanyanya munzvimbo dzakasiyana-siyana dzekushandisa uko midhiya inoparadza iripo, senge maindasitiri emakemikari, oiri uye gasi, midziyo yemagetsi, midziyo yekurapa, nezvimwewo. Vanopa inovimbika kudzivirira ngura, kuderedza ngura uye kukuvadzwa kwezvikamu, kuwedzera. hupenyu hwebasa hwemidziyo, uye chengetedza kugadzikana kwechigadzirwa uye kuvimbika.
Hunhu hwe tantalum carbide corrosion-resistant coating mhete ndeaya anotevera:
1. Corrosion resistance: Tantalum carbide coatings inogona kudzivisa kukukurwa nemhando dzakasiyana-siyana dzehuori, kusanganisira makemikari akadai seasidhi, alkali, uye munyu, zvichipa hutano hwakanaka hwekudzivirira.
2. Kugadzikana kwekushisa kwepamusoro: Tantalum carbide coatings inogona kuchengetedza kugadzikana kwemaitiro uye kumira kwakanaka kwekuora munzvimbo dzakakwirira dzekushisa, uye dzakakodzera kushandiswa munzvimbo dzakakwirira dzekushisa.
3. Yakaderera friction coefficient: Tantalum carbide coatings ine yakaderera friction coefficient, kuderedza friction kurasikirwa uye kushandiswa kwesimba pakati pekuputira nezvimwe zvinhu.
4. Kuomarara kwepamusoro: Tantalum carbide coatings ine kuomarara kwakanyanya uye inogona kuramba kukwenya uye kukuvadzwa kwepamusoro pezvinhu nezvinoodza media.
ne uye pasina TaC
Mushure mekushandisa TaC (kurudyi)
Uyezve, Semicera'sTaC-yakavharwa zvigadzirwakuratidza hupenyu hurefu hwesevhisi uye hukuru hwepamusoro-tembiricha kuramba zvichienzaniswa neSiC coatings.Laboratory kuyerwa kwakaratidza kuti yeduTaC coatingsinogona kugara ichiita patembiricha inosvika 2300 degrees Celsius kwenguva yakareba. Pazasi pane mimwe mienzaniso yemienzaniso yedu:
