Semicera inopa yakasarudzika tantalum carbide (TaC) machira ezvakasiyana zvikamu uye vatakuri.Semicera inotungamira coating process inogonesa tantalum carbide (TaC) machira kuti awane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kushivirira kwemakemikari, kuvandudza mhando yechigadzirwa cheSIC/GAN makristasi uye EPI layer.Graphite yakavharwa neTaC suceptor), uye kuwedzera hupenyu hwezvinhu zvakakosha reactor. Iko kushandiswa kwetantalum carbide TaC coating ndeyekugadzirisa dambudziko remupendero uye kuvandudza kunaka kwekristaro kukura, uye Semicera yakabudirira kugadzirisa tantalum carbide coating tekinoroji (CVD), ichisvika padanho repasi rose.
Tantalum carbide kupfeka-resistant coating rings anoshandiswa zvakanyanya mumhando dzakasiyana-siyana dzekukweshana uye dzepamusoro-soro, senge mechaniki zvisimbiso, pombi masisitimu, mavharuvhu, mabhengi, uye maturusi ekucheka. Ivo vanopa inovimbika kudzivirira kupfeka, kuderedza kupera uye kukuvara kwezvikamu, uye inovandudza kuvimbika uye sevhisi hupenyu hwemidziyo.
Hunhu hwetantalum carbide kupfeka-resistant coating mhete ndeaya anotevera:
1. Pfeka kuramba: Tantalum carbide coating ine kuomarara kwakanyanya uye kupfeka kuramba, inogona kunyatso kurwisa kupokana uye kupfeka, uye kuwedzera hupenyu hwesevhisi yemhete yekupfeka.
2. Yakaderera friction coefficient: Tantalum carbide coating ine yakaderera friction coefficient, inoderedza kurasikirwa kwekukakavadzana uye kushandiswa kwesimba pakati pekuputira nezvimwe zvinhu.
3. Corrosion resistance: Tantalum carbide coating inogona kudzivisa kukukurwa kwemhando dzakasiyana dzemakemikari uye zvinonyungudutsa, ine yakanakisa kusagadzirisa ngura, uye inokodzera kushandiswa munzvimbo dzinopisa.
4. Kugadzikana kwekushisa kwepamusoro: Tantalum carbide coating inogona kuchengetedza kugadzikana kwemaitiro uye kupfeka kwakanaka kwekudzivirira munzvimbo dzekushisa kwepamusoro, uye inokodzera maitiro ekushisa kwepamusoro uye kushandiswa.
ne uye pasina TaC
Mushure mekushandisa TaC (kurudyi)
Uyezve, Semicera'sTaC-yakavharwa zvigadzirwakuratidza hupenyu hurefu hwesevhisi uye hukuru hwepamusoro-tembiricha kuramba zvichienzaniswa neSiC coatings.Laboratory kuyerwa kwakaratidza kuti yeduTaC coatingsinogona kugara ichiita patembiricha inosvika 2300 degrees Celsius kwenguva yakareba. Pazasi pane mimwe mienzaniso yemienzaniso yedu:
