Wafer inobata ruokochinhu chakakosha chinoshandiswa mune semiconductor kugadzira maitiro kubata, kutamisa uye chinzvimbozvimedu. Iyo inowanzo ine robhoti ruoko, gripper uye yekudzora sisitimu, ine chaiyo kufamba uye chinzvimbo.Wafer inobata maokoanoshandiswa zvakanyanya mumhando dzakasiyana-siyana mukugadzira semiconductor, kusanganisira nhanho dzekuita senge wafer kurodha, kuchenesa, nhete firimu deposition, etching, lithography uye kuongorora. Kunyatsoita kwayo, kuvimbika uye otomatiki kugona kwakakosha kuve nechokwadi chemhando, kushanda nesimba uye kuenderana kwemaitiro ekugadzira.
Iwo makuru mabasa ewafer inobata ruoko anosanganisira:
1. Wafer transfer: The wafer handling arm inokwanisa kunyatsoendesa zvimedu kubva kune imwe nzvimbo kuenda kune imwe, zvakadai sekutora wafers kubva panzvimbo yekuchengetedza uye kuaisa muchigadzirwa chekugadzirisa.
2. Positioning uye orientation: Ruoko runobata ruoko runokwanisa kunyatso kumisa uye kutungamira chidimbu kuti ive nechokwadi chekurongeka uye chinzvimbo chekuzotevera kugadzirisa kana kuyerwa mashandiro.
3. Kusunga uye kusunungura: Mawoko ewafer anobata maoko anowanzo kuve ane zvibatiso zvinokwanisa kusungirira mawafer zvakachengeteka uye oasunungura kana zvichidikanwa kuve nechokwadi chekufambisa uye kubata kwemawafers.
4. Automated control: The wafer inobata ruoko yakashongedzerwa ne advanced control system iyo inogona kuita otomatiki yakafanotemerwa kuita sequences, kunatsiridza kugona kwekugadzira uye kuderedza zvikanganiso zvevanhu.
Hunhu uye zvakanakira
1.Precise dimensions uye kugadzikana kwekupisa.
2.Kunyanya kuoma kwakaoma uye kufananidzwa kwekushisa kwakanyanya, kushandiswa kwenguva refu hakusi nyore kukotama deformation.
3.Ine nzvimbo yakatsetseka uye yakanaka kupfeka kusagadzikana, nokudaro kubata zvakachengeteka chip pasina kusvibiswa kwechidimbu.
4.Silicon carbide resistivity mu 106-108Ω, isiri-magnetic, maererano ne-anti-ESD tsanangudzo yezvinodiwa; Inogona kudzivirira kuunganidzwa kwemagetsi akamira pamusoro peiyo chip.
5.Good thermal conductivity, yakaderera kuwedzera coefficient.
