Semicera inopa yakasarudzika tantalum carbide (TaC) machira ezvakasiyana zvikamu uye vatakuri.Semicera Semicera inotungamira coating process inogonesa tantalum carbide (TaC) machira kuti awane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kushivirira kwemakemikari, kuvandudza kunaka kwechigadzirwa cheSIC/GAN makristasi uye EPI layer.Graphite yakavharwa neTaC suceptor), uye kuwedzera hupenyu hwezvinhu zvakakosha reactor. Iko kushandiswa kwetantalum carbide TaC coating ndeyekugadzirisa dambudziko remupendero uye kuvandudza kunaka kwekristaro kukura, uye Semicera yakabudirira kugadzirisa tantalum carbide coating tekinoroji (CVD), ichisvika padanho repasi rose.
Mushure memakore ebudiriro, Semicera yakakunda tekinoroji yeCVD TaCpamwe nekuedza kwakabatana kwebazi reR&D. Kukanganisa kuri nyore kuitika mukukura kweSiC wafers, asi mushure mekushandisaTaC, musiyano unokosha. Pazasi pane kuenzanisa kwemawafer ane uye asina TaC, pamwe neSemicera 'zvikamu zveimwe kristaro kukura.
ne uye pasina TaC
Mushure mekushandisa TaC (kurudyi)
Pamusoro pezvo, hupenyu hwesevhisi hweSemicera's TaC yekupfekedza zvigadzirwa hurefu uye hunoshingirira kune yakanyanya tembiricha kupfuura iyo yeSiC coating. Mushure menguva refu yedata rekuyerwa kwerabhoritari, TaC yedu inogona kushanda kwenguva yakareba kusvika pa2300 degrees Celsius. Aya anotevera mamwe emienzaniso yedu:
(a) Schematic dhayagiramu yeSiC single crystal ingot yekukura mudziyo nenzira yePVT (b) Pamusoro peTaC yakavharwa bhuraketi yembeu (kusanganisira SiC mhodzi) (c) TAC-yakavharidzirwa girafu rekutungamira mhete
