Tantalum carbide (TaC) machira ane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kupikisa kwemakemikari

Tantalum carbide (TaC) machira ane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kupikisa kwakanyanya kwemakemikari.

Tsanangudzo Pfupi

TaC coating chizvarwa chitsva chepamusoro tembiricha inodzivirira zvinhu, ine nani yakadzika tembiricha yakadzikama kupfuura SiC, seyakaomarara isingadziviriki, oxidation inodzivirira coating, kupfeka inodzivirira coating, inogona kushandiswa munzvimbo iri pamusoro pe2000 ℃, inoshandiswa zvakanyanya muaerospace ultra- yakakwirira tembiricha inopisa yekupedzisira zvikamu, chizvarwa chechitatu che semiconductor single crystal kukura uye mamwe minda.

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Semicera Semicera inopa yakasarudzika tantalum carbide (TaC) machira eakasiyana zvikamu uye vatakuri.Semicera Semicera inotungamira coating process inogonesa tantalum carbide (TaC) machira kuti awane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kushivirira kwemakemikari, kuvandudza kunaka kwechigadzirwa cheSIC/GAN makristasi uye EPI layer.Graphite yakavharwa neTaC suceptor), uye kuwedzera hupenyu hwezvinhu zvakakosha reactor.Iko kushandiswa kwetantalum carbide TaC coating ndeyekugadzirisa dambudziko rekumucheto uye kuvandudza kunaka kwekristaro kukura, uye Semicera Semicera yakabudirira yakagadzirisa tantalum carbide coating tekinoroji (CVD), ichisvika padanho repasi rose.

Mushure memakore ebudiriro, Semicera yakakunda tekinoroji yeCVD TaCpamwe nekuedza kwakabatana kwebazi reR&D.Kukanganisa kuri nyore kuitika mukukura kweSiC wafers, asi mushure mekushandisaTaC, musiyano unokosha.Pazasi pane kuenzanisa kwemawafer ane uye asina TaC, pamwe nezvikamu zveSimicera zvekukura kwekristaro imwe chete.

Tac chikamu chekukura imwe kristaro

Antiwear tantalum carbide coating_ Inodzivirira midziyo kubva pakupfeka nekuora Mufananidzo Uripo

Graphite ine TaC yakavharwa mhete

ne uye pasina TaC

Mushure mekushandisa TaC (kurudyi)

Pamusoro pezvo, hupenyu hwesevhisi hweSemicera's TaC yekupfekedza zvigadzirwa hurefu uye hunoshingirira kune yakanyanya tembiricha kupfuura iyo yeSiC coating.Mushure menguva refu yedata rekuyerwa kwerabhoritari, TaC yedu inogona kushanda kwenguva yakareba kusvika pa2300 degrees Celsius.Aya anotevera mamwe emienzaniso yedu: