Semicera inopa yemhando yepamusoro tsikasilicon carbide cantilever paddlesyakagadzirirwa kukwidziridza semiconductor kugadzira maitiro. The innovativeSiC paddledhizaini inogonesa kusimba kwakasarudzika uye yakakwirira kupisa kwekupisa, zvichiita kuti ive chinhu chakakosha chekubata kwewafer munzvimbo dzakaoma dzekupisa.
TheSilicon carbide paddleyakavakirwa kumirisana nekupisa kwakanyanyisa kutenderera uku uchichengetedza kutendeseka kwechimiro, kuve nechokwadi chekufambisa chakavimbika chewafer panguva dzakaoma zvikamu zvekugadzira semiconductor. Nesimba remagetsi repamusoro, izvichikepe chewaferinoderedza njodzi yekukuvadzwa kwewafers, zvichitungamira kune goho repamusoro uye inowirirana mhando yekugadzira.
Imwe yeakakosha magadzirirwo muSemicera's SiC paddle iri mune yayo tsika dhizaini sarudzo. Yakagadzirirwa kusangana nezvinodiwa zvekugadzira, iyo paddle inopa kuchinjika mukubatanidza neakasiyana emidziyo setups, zvichiita kuti ive mhinduro yakanaka kune yazvino maitiro ekugadzira. Kuvaka kwakareruka asi kwakasimba kunogonesa kubata kuri nyore uye kunoderedza kushanda nguva, zvichibatsira mukuvandudza mashandiro mukugadzirwa kwesemiconductor.
Pamusoro peiyo thermal uye mechanical properties, iyoSilicon carbide paddleinopa yakanakisa makemikari kuramba, ichibvumira kuti iite zvakavimbika kunyangwe munzvimbo dzakaomarara dzemakemikari. Izvi zvinoita kuti inyatsokodzera kushandiswa mumaitirwo anosanganisira etching, deposition, uye high-temperature kurapwa, uko kuchengetedza kuperera kwechikepe chewafer kwakakosha pakuita kuti pave nemhando yepamusoro yekubuda.
| Zvenyama zvimiro zveRecrystallized Silicon Carbide | |
| Property | Typical Value |
| Tembiricha yekushanda (°C) | 1600°C (neokisijeni), 1700°C (inoderedza nharaunda) |
| SiC content | > 99.96% |
| Free Si content | <0.1% |
| Bulk density | 2.60-2.70 g/cm3 |
| Inooneka porosity | <16% |
| Kumanikidza simba | > 600 MPa |
| Kutonhora kukotama simba | 80-90 MPa (20°C) |
| Simba rekukotama rinopisa | 90-100 MPa (1400°C) |
| Kuwedzera kupisa @1500°C | 4.70 10-6/°C |
| Thermal conductivity @1200°C | 23 W/m•K |
| Elastic modulus | 240 GPA |
| Thermal shock resistance | Kunyanya kunaka |
