Silicon Carbide Substrates | SiC Wafers

Tsanangudzo Pfupi

WeiTai Energy Technology Co., Ltd. mutengesi anotungamira anonyanya hunyanzvi mune wafer uye yepamusoro semiconductor yekushandisa.Isu takatsaurirwa kupa zvemhando yepamusoro, zvakavimbika, uye zvigadzirwa zvitsva kune semiconductor kugadzira, photovoltaic indasitiri uye mamwe ane hukama minda.

Mutsetse wedu wechigadzirwa unosanganisira SiC/TaC yakavharwa magirafu zvigadzirwa uye zvigadzirwa zveceramic, zvinosanganisira zvinhu zvakasiyana siyana sesilicon carbide, silicon nitride, uye aluminium oxide nezvimwe.

Parizvino, ndisu chete mugadziri kupa kuchena 99.9999% SiC coating uye 99.9% recrystallized nesilicon carbide.Iyo yakakura SiC yekupfeka kureba tinogona kuita 2640mm.


Product Detail

Product Tags

SiC-Wafer

Silicon carbide (SiC) single crystal material ine bhendi hombe gap upamhi (~Si 3 nguva), high thermal conductivity (~Si 3.3 nguva kana GaAs ka10), high electron saturation migration rate (~Si 2.5 times), high breakdown magetsi munda (~ Si 10 nguva kana GaAs 5 nguva) uye mamwe maitiro akatanhamara.

Zvishandiso zveSiC zvine zvakanakira zvisingadzoreki mumunda wekupisa kwepamusoro, kudzvanywa, kukwirisa, kukwira kwemagetsi, masimba emagetsi emagetsi uye akanyanya kushandiswa kwezvakatipoteredza senge aerospace, mauto, simba renyukireya, nezvimwe, zvinogadzira hurema hwechinyakare semiconductor zvinhu zvishandiso zvinoshanda. maapplication, uye zvishoma nezvishoma vari kuve iwo makuru emagetsi semiconductors.

4H-SiC Silicon carbide substrate tsanangudzo

Item项目

Specifications参数

Polytype
晶型

4H -SiC

6H- SiC

Diameter
晶圆直径

2 inch |3 inch |4 inch |6inch

2 inch |3 inch |4 inch |6inch

Ukobvu
厚度

330 μm ~ 350 μm

330 μm ~ 350 μm

Conductivity
导电类型

N - mhando / Semi-inodzivirira
N型导电片/ 半绝缘片

N - mhando / Semi-inodzivirira
N型导电片/ 半绝缘片

Dopant
掺杂剂

N2 (Nitrogen)V (Vanadium)

N2 (Nitrogen) V (Vanadium)

Orientation
晶向

Paaxis <0001>
Kubva paaxis <0001> kubva pa4°

Paaxis <0001>
Kubva paaxis <0001> kubva pa4°

Resistivity
电阻率

0.015 ~ 0.03 ohm-cm
(4H-N)

0.02 ~ 0.1 ohm-cm
(6H-N)

Micropipe Density (MPD)
微管密度

≤10/cm2 ~ ≤1/cm2

≤10/cm2 ~ ≤1/cm2

TTV
总厚度变化

≤ 15 μm

≤ 15 μm

Bow / Warp
翘曲度

≤25 μm

≤25 μm

Surface
表面处理

DSP/SSP

DSP/SSP

Giredhi
产品等级

Kugadzira / giredhi rekutsvaga

Kugadzira / giredhi rekutsvaga

Crystal Stacking Sequence
堆积方式

ABCB

ABCABC

Lattice parameter
晶格参数

a=3.076A , c=10.053A

a=3.073A , c=15.117A

Eg/eV(Band-gap)
禁带宽度

3.27 eV

3.02 eV

ε (Dielectric Constant)
介电常数

9.6

9.66

Refraction Index
折射率

n0 =2.719 ne =2.777

n0 =2.707 , ne =2.755

6H-SiC Silicon Carbide substrate tsanangudzo

Item项目

Specifications参数

Polytype
晶型

6H-SiC

Diameter
晶圆直径

4 inch |6inch

Ukobvu
厚度

350μm ~ 450μm

Conductivity
导电类型

N - mhando / Semi-inodzivirira
N型导电片/ 半绝缘片

Dopant
掺杂剂

N2( Nitrogen)
V ( Vanadium )

Orientation
晶向

<0001> kubva pa4°± 0.5°

Resistivity
电阻率

0.02 ~ 0.1 ohm-cm
(6H-N Type)

Micropipe Density (MPD)
微管密度

≤ 10/cm2

TTV
总厚度变化

≤ 15 μm

Bow / Warp
翘曲度

≤25 μm

Surface
表面处理

Si Face: CMP, Epi-Yakagadzirira
C Chiso: Optical Polish

Giredhi
产品等级

Research giredhi

Semicera Nzvimbo yebasa Semicera nzvimbo yebasa 2 Equipment muchina CNN kugadzirisa, kuchenesa makemikari, CVD coating Basa redu


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