Silicon carbide wafer kugadzira maitiro

Silicon carbide waferinogadzirwa nekuchena kwesilicon poda uye yakakwira kuchena kabhoni poda semidziyo yakabikwa, uye silicon carbide crystal inokura nenzira yekufambisa mhute yemuviri (PVT), uye inogadziriswa kuita.silicon carbide wafer.

① Raw material synthesis. Yakanyanya kuchena silicon poda uye yakakwira kuchena kabhoni poda yakasanganiswa zvinoenderana neimwe chiyero, uye silicon carbide zvimedu zvakagadzirwa pakupisa kwepamusoro pamusoro pe2,000 ℃. Mushure mekupwanya, kuchenesa uye mamwe maitiro, iyo yakakwira kuchena silicon carbide poda mbishi zvinhu zvinosangana nezvinodiwa zvekristaro kukura zvakagadzirirwa.

② Crystal kukura. Ichishandisa yakakwira kuchena SIC poda seyakabikwa, iyo kristaro yakasimudzwa neyemuviri mhute yekufambisa (PVT) nzira ichishandisa yakazvigadzira yekristaro yekukura choto.

③ ingot kugadzirisa. Iyo yakawanikwa silicon carbide crystal ingot yakanangidzirwa neX-ray imwe crystal orientator, yobva yadzika nekukungurutswa, uye yakagadziridzwa kuita yakajairika dhayamita silicon carbide crystal.

④ Crystal kucheka. Uchishandisa michina yekucheka-mitsetse yakawanda, silicon carbide makristasi anochekwa kuita mapepa matete ane ukobvu husingapfuure 1mm.

⑤ Chip kugaya. Wafer inogayiwa kusvika pakuda kupfava uye kushata nedhaimani rinokuya zvinwiwa zvemhando dzakasiyana siyana.

⑥ Chip polishing. Iyo yakakwenenzverwa silicon carbide isina kukuvadzwa kwepamusoro yakawanikwa nemuchina wekupolisha uye kemikari mechanical polishing.

⑦ Kuonekwa kwechip. Shandisa optical microscope, X-ray diffractometer, atomic force microscope, non-contact resistivity tester, surface flatness tester, surface defect comprehensive tester uye zvimwe zviridzwa uye midziyo yekuona microtubule density, crystal quality, roughness, resistivity, warpage, curvature, Shanduko yehukobvu, kukwenya kwepamusoro uye mamwe ma paramita esilicon carbide wafer. Maererano neizvi, hutano hwehutano hwechip hunotarirwa.

⑧ Chip kuchenesa. Iyo silicon carbide polishing sheet inocheneswa neajenti yekuchenesa uye mvura yakachena kubvisa yakasara yekupukuta mvura uye imwe tsvina yepasi papepa rekuporisha, uye ipapo jira rinopeperetswa uye rinozunguzwa raoma ne-ultra-high purity nitrogen uye muchina wekuomesa; Iyo wafer yakavharidzirwa mubhokisi rakachena pepa mukamuri rakachena-yakachena kuti riite yakadzika yakagadzirira-kushandisa-silicon carbide wafer.

Iyo yakakura iyo chip size, iyo yakanyanya kuoma inoenderana nekristaro kukura uye kugadzirisa tekinoroji, uye iyo yakakwirira yekugadzira hunyanzvi hwemidziyo yakadzika, inodzikira mutengo weyuniti.