TaC yakavharwa graphite gwara mhetekureva kuiswa kwechidimbu chetantalum carbidepamusoro pechindori chegirafu chegirafu kuti uvandudze kusakara kwayo, kupisa kwekushisa kwepamusoro uye kugadzikana kwemakemikari. Ichi chivharo chinowanzo umbwa pamusoro pechindori chegwara regirafu nemaitiro akadai semupfuti wemuviri (PVD) kana kemikari vapor deposition (CVD).
Semicera inopa yakasarudzika tantalum carbide (TaC) machira ezvakasiyana zvikamu uye vatakuri.Semicera inotungamira coating process inogonesa tantalum carbide (TaC) machira kuti awane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kushivirira kwemakemikari, kuvandudza mhando yechigadzirwa cheSIC/GAN makristasi uye EPI layer.Graphite yakavharwa neTaC suceptor), uye kuwedzera hupenyu hwezvinhu zvakakosha reactor. Iko kushandiswa kwetantalum carbide TaC coating ndeyekugadzirisa dambudziko remupendero uye kuvandudza kunaka kwekristaro kukura, uye Semicera yakabudirira kugadzirisa tantalum carbide coating tekinoroji (CVD), ichisvika padanho repasi rose.
Mushure memakore ebudiriro, Semicera yakakunda tekinoroji yeCVD TaCpamwe nekuedza kwakabatana kwebazi reR&D. Kukanganisa kuri nyore kuitika mukukura kweSiC wafers, asi mushure mekushandisaTaC, musiyano unokosha. Pazasi pane kuenzanisa kwemawafer ane uye asina TaC, pamwe neSimicera 'zvikamu zvekukura kwekristaro imwe chete.
Iwo makuru maficha eTaC yakavharwa graphite gwara mhete zvinosanganisira:
1. Kudzivirira kwekushisa kwepamusoro: TaC coating ine yakanakisa kugadzikana kwekushisa kwepamusoro uye inogona kuchengetedza kugadzikana munzvimbo dzekushisa kwepamusoro.
2. Pfeka kuramba: Kuoma kwepamusoro kwetantalum carbide nhete yakatsetseka inopa mutungamiri mhete yakanaka yekupfeka kuramba uye inowedzera hupenyu hwayo hwebasa.
3. Kugadzikana kwekemikari: TaC yekuputira ine kugadzikana kwakanyanya kunopesana nekuora kwemakemikari, zvichiita kuti ive yakakodzera kushandiswa mune imwe midhiya inoparadza.
4. Deredza kukakavara: Kuvhara kweTaC kunogona kunyatso kuderedza kupesana pakati pegirafu rinotungamirira mhete uye zvimwe zvikamu uye kuvandudza kushanda kwezvisimbiso zvemagetsi.
ne uye pasina TaC
Mushure mekushandisa TaC (kurudyi)
Uyezve, Semicera'sTaC-yakavharwa zvigadzirwakuratidza hupenyu hurefu hwesevhisi uye hukuru hwepamusoro-tembiricha kuramba zvichienzaniswa neSiC coatings.Laboratory kuyerwa kwakaratidza kuti yeduTaC coatingsinogona kugara ichiita patembiricha inosvika 2300 degrees Celsius kwenguva yakareba. Pazasi pane mimwe mienzaniso yemienzaniso yedu:
