Tantalum carbide yakavharwa susceptor tsigiro ndirois a susceptor or support structure iyo yakafukidzwa nekatetepa ketantalum carbide. Ichi chipfeko chinogona kuumbwa pamusoro pe susceptor pamusoro nemaitiro akadai semuviri vapor deposition (PVD) kana kemikari vapor deposition (CVD), ichipa susceptor iyo yepamusoro zvivakwa.tantalum carbide.
Semicera inopa yakasarudzika tantalum carbide (TaC) machira ezvikamu zvakasiyana uye vatakuri.Semicera inotungamira coating process inogonesa tantalum carbide (TaC) machira kuti awane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kushivirira kwemakemikari, kuvandudza mhando yechigadzirwa cheSIC/GAN makristasi uye EPI layer.Graphite yakavharwa neTaC suceptor), uye kuwedzera hupenyu hwezvinhu zvakakosha reactor. Iko kushandiswa kwetantalum carbide TaC coating ndeyekugadzirisa dambudziko remupendero uye kuvandudza kunaka kwekristaro kukura, uye Semicera yakabudirira kugadzirisa tantalum carbide coating tekinoroji (CVD), ichisvika padanho repasi rose.
Mushure memakore ebudiriro, Semicera yakakunda tekinoroji yeCVD TaCpamwe nekuedza kwakabatana kwebazi reR&D. Kukanganisa kuri nyore kuitika mukukura kweSiC wafers, asi mushure mekushandisaTaC, musiyano unokosha. Pazasi pane kuenzanisa kwemawafer ane uye asina TaC, pamwe neSimicera 'zvikamu zvekukura kwekristaro imwe chete.
Iwo makuru maficha e tantalum carbide coated base ekutsigira mahwendefa anosanganisira:
1. Kugadzikana kwekushisa kwepamusoro: Tantalum carbide ine yakanakisa kugadzikana kwekushisa kwepamusoro, ichiita iyo yakavharidzirwa yetsigiro ndiro yakakodzera kutsigira zvinodiwa munzvimbo dzekushanda kwekushisa.
2. Corrosion resistance: Tantalum carbide coating ine good corrosion resistance, inogona kuramba makemikari ekuora uye oxidation, uye kuwedzera hupenyu hwebasa hwebhesi.
3. Kuomarara kwepamusoro uye kuramba kupfeka: Kuomarara kwakanyanya kwetantalum carbide coating inopa hwaro hwetsigiro ndiro yakanaka yekupfeka kuramba, iyo yakakodzera kune dzimwe nguva inoda yakakwirira kupfeka kuramba.
4. Kugadzikana kwemakemikari: Tantalum carbide ine kugadzikana kwepamusoro kune zvakasiyana-siyana zvemakemikari zvinhu, zvichiita kuti iyo yakavharidzirwa base support plate iite zvakanaka mune dzimwe nzvimbo dzinopisa.
ne uye pasina TaC
Mushure mekushandisa TaC (kurudyi)
Uyezve, Semicera'sTaC-yakavharwa zvigadzirwakuratidza hupenyu hurefu hwesevhisi uye hukuru hwepamusoro-tembiricha kuramba zvichienzaniswa neSiC coatings.Laboratory kuyerwa kwakaratidza kuti yeduTaC coatingsinogona kugara ichiita patembiricha inosvika 2300 degrees Celsius kwenguva yakareba. Pazasi pane mimwe mienzaniso yemienzaniso yedu:
