Tantalum carbide (TaC) machira ane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kupikisa kwemakemikari

Tantalum carbide (TaC) machira ane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kupikisa kwakanyanya kwemakemikari.

Tsanangudzo Pfupi:

TaC coating chizvarwa chitsva chepamusoro tembiricha inodzivirira zvinhu, ine zvirinani kudzikama tembiricha kupfuura SiC, inoshanda senge inodzivirira corrosion, inodzivirira oxidation, uye kupfeka-inodzivirira coating, inogona kushandiswa munzvimbo iri pamusoro pe2000 ℃, inoshandiswa zvakanyanya mukati. aerospace Ultra-yakakwira tembiricha inopisa yekupedzisira zvikamu, chizvarwa chechitatu che semiconductor single crystal kukura uye mamwe minda.

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Semicera inopa yakasarudzika tantalum carbide (TaC) machira ezvakasiyana zvikamu uye vatakuri.Semicera inotungamira coating process inogonesa tantalum carbide (TaC) machira kuti awane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kushivirira kwemakemikari, kuvandudza mhando yechigadzirwa cheSIC/GAN makristasi uye EPI layer.Graphite yakavharwa neTaC suceptor), uye kuwedzera hupenyu hwezvinhu zvakakosha reactor. Iko kushandiswa kwetantalum carbide TaC coating ndeyekugadzirisa dambudziko remupendero uye kuvandudza kunaka kwekristaro kukura, uye Semicera yakabudirira kugadzirisa tantalum carbide coating tekinoroji (CVD), ichisvika padanho repasi rose.

Mushure memakore ebudiriro, Semicera yakakunda tekinoroji yeCVD TaCpamwe nekuedza kwakabatana kwebazi reR&D. Kukanganisa kuri nyore kuitika mukukura kweSiC wafers, asi mushure mekushandisaTaC, musiyano unokosha. Pazasi pane kuenzanisa kwemawafer ane uye asina TaC, pamwe neSemicera 'zvikamu zveimwe kristaro kukura.

Tac chikamu chekukura imwe kristaro

Antiwear tantalum carbide coating_ Inodzivirira midziyo kubva pakupfeka nekuora Mufananidzo Uripo

Graphite ine TaC yakavharwa mhete

ne uye pasina TaC

Mushure mekushandisa TaC (kurudyi)

Pamusoro pezvo, hupenyu hwesevhisi hweSemicera's TaC yekupfekedza zvigadzirwa hurefu uye hunoshingirira kune yakanyanya tembiricha kupfuura iyo yeSiC coating. Mushure menguva refu yedata rekuyerwa kwerabhoritari, TaC yedu inogona kushanda kwenguva yakareba kusvika pa2300 degrees Celsius. Aya anotevera mamwe emienzaniso yedu: