Mumunda we semiconductor, kugadzikana kwechikamu chimwe nechimwe kwakakosha kune iyo yose maitiro. Zvisinei, munzvimbo yakakwirira-yekupisa, graphite iri nyore oxidized uye yakarasika, uye SiC coating inogona kupa kuchengetedzwa kwakagadzikana kwezvikamu zvegraphite. MuSemiceratimu, isu tine yedu girafu yekuchenesa midziyo yekugadzirisa, iyo inogona kudzora kuchena kwegraphite pazasi 5ppm. Kuchena kwesilicon carbide coating iri pazasi 0.5 ppm.
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Epitaxy Kukura Susceptor
Silicon / silicon carbide wafers inoda kupfuura nematanho akawanda kuti ashandiswe mumidziyo yemagetsi. Nzira yakakosha ndeyesilicon/sic epitaxy, umo silicon/sic wafers inotakurwa pachigadziko chegraphite. Yakakosha mabhenefiti eSemicera's silicon carbide-yakavharwa graphite base inosanganisira yakanyanya kuchena kuchena, yunifomu yekupfeka, uye yakanyanyisa hupenyu hwesevhisi. Vanewo kukwirira kwemakemikari uye kugadzikana kwekupisa.
LED Chip Kugadzirwa
Munguva yekuputira kwakakura kweMOCVD reactor, chigadziko chepuraneti kana mutakuri anofambisa substrate wafer. Kuitwa kwechigadziko chinhu chine simba guru pahutano hwekuputira, izvo zvinokanganisa chiyero chezvimedu zvechip. Semicera's silicon carbide-coated base inowedzera kugona kwekugadzira kwemhando yepamusoro LED wafers uye inoderedza wavelength kutsauka. Isu tinopawo mamwe magirafu zvikamu kune ese MOCVD reactor ari kushandiswa parizvino. Tinogona kupfeka chero chinhu chine silicon carbide coating, kunyangwe iyo chikamu dhayamita inosvika 1.5M, isu tinogona kuramba takapfeka nesilicon carbide.
Semiconductor Munda, Oxidation Diffusion process, Etc.
Mukuita semiconductor, iyo oxidation yekuwedzera maitiro inoda yakakwira chigadzirwa kuchena, uye paSemicera tinopa tsika uye CVD yekupfekedza masevhisi kune mazhinji esilicon carbide zvikamu.
Mufananidzo unotevera unoratidza rough-yakagadziriswa silicon carbide slurry yeSemicea uye iyo silicon carbide furnace chubhu inocheneswa mu100.0-levelisina guruvaroom. Vashandi vedu vari kushanda vasati vapfeka. Kuchena kwesilicon carbide yedu kunogona kusvika 99.99%, uye kuchena kwe sic coating yakakura kupfuura 99.99995%.